Toflo Corporation

Takuo Shimada

Takahiro Kawamoto

Shinji Tobimatsu

Tetsuaki Sekine

Yuka Fujie

Maya Nakamura

A flowmeter suitable for flow measurement of extremely-low temperature fluids and high temperature fluids includes a flow path pipe having a flow path for fluid to flow through; an impeller supported in the interior of the flow path pipe in a rotatable manner; and a sensor that measures the flow of the fluid flowing in the flow path through the rotation of the impeller. The sensor has a metal-based wiring substrate inside a sensor housing provided outside the flow path pipe. The wiring substrate is equipped with a magnetic sensor package that detects the magnetic force of the impeller; a heater that heats the wiring substrate; and a temperature control circuit that controls the heater to power on/off based on the temperature of the wiring substrate.

Flowmeter

An object is to provide a flow rate control device that can suppress a manufacturing cost and greatly reduce burdens of setting and maintenance. A flow rate control deviceof the invention is comprised with a flow rate adjusting valvethat is installed in a flow path, a flow rate measurement partthat measures a flow rate of a fluid flowing through the flow path, a controllerthat controls opening degrees of the flow rate adjusting valvebased on a measurement result of the flow rate measurement part, and a pressure deficiency detecting function that detects pressure deficiency when a limit sensor(an opening detecting sensor) that detects the opening of the flow rate adjusting valvedetects the opening degrees are full. With the structure, it becomes possible, compared with a conventional system to detect a pressure deficiency using a pressure sensor, to suppress a manufacturing cost and greatly reduce burdens of setting and maintenance and to notify of pressure deficiency at a necessary timing in an early stage before an abnormality occurs due to a flow rate decrease.

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Hino, Japan

Takuo Shimada