Tgk Co., Inc.

Hitachi Industrial Equipment Systems Co., Ltd.

Sony Corporation

Mitsubishi Heavy Industries Limited

Jeol Ltd.

Mitsubishi Heavy Industries Compressor Corporation

Mitsubishi Heavy Industries Thermal Systems, Ltd.

Sony Semiconductor Solutions Corporation

National Institute of Advanced Industrial Science and Technology

Hirose Electric Company, Ltd.

Takeshi Kaneko

Ryosuke Satake

Takeshi Matsumura

Hirotoshi Sato

Kenichiro Yazawa

Yoshiaki Kakinuma

Takeshi Watanabe

Yuji Shishido

Hiroshi Sato

Takanao Kumakura

Kiyoyuki Takada

Hisatoshi Hirota

Ichiro Nakamura

Koichi Tanimoto

Nobuhide Hara

Koichiro Iida

Yoichi Uefuji

Shinji Saeki

Setsuo Omoto

Keiichi Nakagawa

Kazutoshi Yokoo

Hiroyuki Nakaharai

Shunsaku Eguchi

Tomoaki Takeda

Hidetaka Oguma

Masaki Taneike

Masahiro Hayashi

Taichi Yoshii

Masaki Shakuda

Ryo Egami

Keiichi Sato

Yasushi Hasegawa

Keisuke Yoshida

Yutaka Imai

Toshiya Watanabe

Kenichi Souma

Yushi Kaneda

Hiroto Watanabe

Naoya Miyoshi

Masaaki Tonegawa

Masaya Hatanaka

Makoto Yokoyama

Naoki Fujimoto

Masashi Kitamura

Masahiko Nagai

Satoshi Hayakawa

Ryuichi Narita

Yasutaka Aoki

Tsutomu Hamada

Toshiyuki Shiota

Kenji Kirihara

Yuta Takahashi

Akihiko Yamamoto

Isao Sendo

Sang Tae Park

Misaki Fukuyama

Yu Jimbo

Kenji Atarashiya

Junji Asahara

Isamu Ishikawa

Yuta Iwamoto

Tomoyuki Naganuma

Masashi Takasawa

Kuniharu Baba

Haruhiko Adachi

Toshihiko Suwa

Takahiro Kashima

Yukio Mori

Tsutomu Sakashita

Yukiyasu Sano

Yuta Chinen

Takayuki Numata

Eiji Okunishi

Norihiro Okoshi

Takafumi Jyonouchi

Yasushi Omata

Ryouta Sugamura

A safety work device having a plurality of HEPA filters in an exhaust system suppresses leakage of contaminants. The work device includes: a work space; a front shutter covering part of a front opening surface of the work space; a work opening portion below the front shutter, through which a worker puts hands to perform work; a rear port provided at a lower portion of a back surface of the work space to suction air; and an exhaust flow path provided behind the back surface of the work space to exhaust the air in the work space. A first HEPA filter for exhaust is disposed in a vertical direction in the exhaust flow path and behind the rear port, and a second HEPA filter for exhaust is disposed in the vertical direction in the exhaust flow path and on a downstream side of the first HEPA filter.

Safety work device

There is provided an isolator that is capable of improving work efficiency by shortening a sterilization time, and that is capable of securing a sterility assurance level. An isolator, in which a circulation fan above a work room supplies clean air to the work room via a HEPA filter, includes: the work room; a front door provided in a front surface of the work room; a glove provided in the front door; and an air supply unit that causes an air supply HEPA filter to clean air taken in from an air supply airtight damper, and that causes an air supply fan to supply the clean air into the isolator, when work is performed. When a sterilization gas is removed, the air supply unit is configured such that the air supply fan circulates the air inside the isolator through a sterilization gas-removing catalyst.

Isolator and method for sterilizing same

A laser light profile measuring device of the present disclosure includes a reflection attenuation part reflecting and attenuating at least part of laser light incident from a first direction in a direction different from the first direction to generate measurement target laser light traveling in the first direction, a capture unit placed on one side of the reflection attenuation part in the first direction and which captures the measurement target laser light, a cooling body covering at least part of the reflection attenuation part and the capture unit in a circumferential direction with respect to the first direction, a refrigerant supply unit forcibly feeding a refrigerant toward the cooling body, and a rotation support part supporting the reflection attenuation part, the cooling body, and the refrigerant supply unit to be rotatable around a rotation axis extending in a horizontal direction.

Laser light profile measuring device and laser light profile measuring method

Provided is a charged particle beam system capable of preventing the data acquisition time from increasing. A control method for the system is also provided. The charged particle beam system includes: a beam blanker for blanking a charged particle beam; a sample stage on which a sample is tiltably held and thus can assume a tilt angle; a blanking controller for controlling the blanking of the charged particle beam and causing a pulsed beam having a duty ratio to be directed at the sample; and a tilt controller for controlling the tilt angle of the sample. The blanking controller sets the duty ratio of the pulsed beam based on the tilt angle of the sample.

Charged particle beam system and control method therefor

A contamination prevention irradiation device includes a generation unit and a mirror unit. The generation unit generates a laser beam. The mirror unit has a mirror surface for reflecting a laser beam. The laser beam reflected on the mirror surface is applied to a specimen disposed inside an objective lens. The laser beam is composed of a pulse train. Once a laser beam is applied to the specimen before observation of the specimen, deposition of contaminants on the specimen can be prevented for a predetermined subsequent period.

Electron microscope and specimen contamination prevention method

A laminar flow at a high air speed can be maintained, and contamination caused by operation of a device or operation of the device by a person can be suppressed as much as possible. There is provided a safety cabinet that supplies clean air into a work room from above, the cabinet including: an opening portion in a front surface of the work room; a front shutter; partition plates provided on right and left side surfaces and a back surface on an upper side of the work room; and a partition on a front upper side of the work room.

Safety cabinet

A heat exchange core according to one embodiment includes: a header flow path that extends in a first direction; and a plurality of branching flow paths that are connected to the header flow path and extend in a second direction intersecting with the first direction. A first angle formed by the header flow path with respect to a virtual connection plane between the header flow path and the plurality of branching flow paths is less than a second angle formed by the branching flow paths with respect to the connection plane.

Heat exchange core and heat exchanger

A safety cabinet that includes an opening portion in a front surface of a work space and a front shutter, and supplies purified air into the work space from above. The front shutter slides in an upward and downward direction to close a part or an entirety of the opening portion. The front shutter includes a small window shutter that slides in a lateral direction.

Sample contamination is suppressed by strengthening the air barrier of a work opening portion. A safety cabinet includes: a work room; a front surface door covering a part of a front opening portion of the work room; and a work opening portion on a lower side of the front surface door allowing a worker to work with his or her hand in. An intake port suctions air in the work room and outside air through the work opening portion on a front surface side of a workbench in a lower portion of the work room. A straightening plate drawing an air flow and a linear light source are provided on the work room side of the front surface door and above a front portion of the work room.

A pass box delivering an article with respect to a clean room includes a blower provided in an upper portion of the pass box, a first door on the clean room side, a first handle provided on the clean room side and opening and closing the first door, a first handle receiving portion rotating with the first handle in the pass box, a first handle receiving seat engaging with the first handle receiving portion in the pass box, and a storage stand provided in a lower portion of the pass box. The storage stand has a slit allowing air from the blower to be exhausted from an inner portion of the pass box.

Pass box

The present invention provides a pass box with which not only surface sterilization by means of a germicidal lamp on an article delivered in the pass box but also isolation of different articles can be performed in a space-saving manner, the cleanliness in the pass box is maintained, and mutual contamination is prevented during article delivery in the pass box. Air is sent from a blower of an upper pass box to an upper space of the upper pass box through a filter, the air is supplied to a lower space of a lower pass box via the upper space, and an airflow circulation path is provided to return the air that has passed through the lower space to the upper blower.

Provided is a sample loading method of loading a cooled sample into a sample exchange chamber of a charged particle beam apparatus includes: attaching the sample container in which a sample and liquid nitrogen are accommodated to the sample exchange chamber via a gate valve; evacuating a space between a liquid surface of the liquid nitrogen and the gate valve in a state in which the gate valve is closed; discharging the liquid nitrogen in the sample container after the space between the liquid surface of the liquid nitrogen and the gate valve has been evacuated; evacuating a space in the sample container after the liquid nitrogen in the sample container has been discharged; and opening the gate valve after the space in the sample container has been evacuated.

Sample loading method and charged particle beam apparatus

A safety cabinet includes an operation stage on which an operation is performed, an operation space in which an operator performs the operation, a front panel disposed in front of the operation space, an operation opening connected to the operation space, exhausting means that suctions air from the operation opening and exhausts air in the operation space outside the safety cabinet through air purifying means, and visualizing means that visualizes an air flow in the operation space.

Provided is a fan filter unit with which the performance of a HEPA filter can be measured at multiple points with ease and in a short time. The fan filter unit has a first HEPA filter, a second HEPA filter, and exhaust means installed between the first HEPA filter and the second HEPA filter. The first HEPA filter, the second HEPA filter, and the exhaust means are integrated by a housing.

Fan filter unit and HEPA filter performance measurement method

A heat exchanger according to one embodiment includes: a heat exchange core; a shell provided to surround the heat exchange core; and a first partition wall that is provided in a space surrounded by an outer surface of the heat exchange core and an inner surface of the shell, and partitions the space into a first header space communicating with the heat exchange core and a second header space communicating with the heat exchange core. The first header space and the second header space are adjacent to each other, separated by the first partition wall.

Heat exchanger and replacement method of heat exchange core

Growing community of inventors

Tokyo, Japan

Takeshi Kaneko