Canon Anelva Corporation

Takeo Konno

Masahiro Suenaga

Koji Tsunekawa

Naoki Watanabe

Motonobu Nagai

Toru Kitada

A sputtering apparatus according to one embodiment of the present invention includes a substrate holder, a cathode unit arranged at a position diagonally opposite to the substrate holder, a position sensor for detecting a rotational position of the substrate, and a holder rotation controller for adjusting a rotation speed of the substrate according to the detected rotational position. The holder rotation controller controls the rotation speed so that the rotation speed of the substrate when the cathode unit is located on a side in a first direction as an extending direction of a process target surface of the relief structure is lower than the rotation speed of the substrate when the cathode unit is located on a side in a second direction which is perpendicular to the first direction along the rotation of the substrate.

Sputtering apparatus, film deposition method, and control device

A magnetic film having excellent uniformity in in-plane distribution of film thickness or sheet resistance is formed when the film is formed by forming a magnetic field on a processing surface of a substrate () and performing oblique incidence sputtering by using high discharge power. A sputtering apparatus () is provided with a substrate holder () for holding rotatably the substrate () in the surface direction of the processing surface of the substrate; a substrate magnetic field forming device () which is disposed to surround the substrate () and forms a magnetic field on the processing surface of the substrate (); cathodes () which are arranged diagonally above the substrate () and are supplied with electric discharge power; a position detecting device () for detecting a rotation position of the substrate (); and a control device () which adjusts the rotation speed of the substrate () in accordance with the rotation position detected by the position detecting device ().

Growing community of inventors

Kawasaki, Japan

Takeo Konno