Daikin Industries, Ltd.

Hokkaido University

Tokyo Electron Limited

Takashi Namikawa

Yosuke Kishikawa

Kenji Adachi

Sumi Ishihara

Hisashi Mitsuhashi

Atsushi Shirai

Shoji Hara

Mayuko Takano

Takashi Nomura

Tomohiro Yoshida

Tatsuya Ohtsuka

Masatoshi Nose

Kenichi Katsukawa

Akihiro Gotou

Masahiro Higashi

Takashi Fuse

Masayuki Kishimoto

Asako Yoshiyama

Kensuke Mohara

Makoto Suyama

Yuuki Yamamoto

Manaho Miyazaki

Yousuke Kishikawa

Asako Tanaka

A film forming method is a method of forming a film on a substrate top face including a first region in which a metal or a semiconductor is exposed and a second region in which an insulator is exposed. The method includes a SAM forming process of forming a self-assembled monolayer film of a perfluoropolyether group-containing compound on the first region and a film growth process of forming a predetermined film on the second region after execution of SAM forming process.

Film forming method and film forming apparatus

A perfluoro(poly)ether group containing silane compound of formula (1a) or (1b):(Rf-PFPE)-X&#x2014;(CRRR)&#x2003;&#x2003;(1a)(RRRC)&#x2014;X-PFPE-X&#x2014;(CRRR)&#x2003;&#x2003;(1b)wherein the symbols are as defined herein.

Silane compound containing perfluoro(poly)ether group

The present invention provides a perfluoro(poly)ether group containing silane compound of the formula (1):XRRR&#x2003;&#x2003;(1)wherein each symbols are as defined in the description.

Perfluoro(poly)ether group containing silane compound

A surface-treating agent including at least one perfluoro(poly)ether group containing silane compound of the formula (1): wherein each of symbols is as defined herein, wherein a number average molecular weight of the perfluoro(poly)ether group containing silane compound is 3000 or more and 6000 or less, and wherein 80 mol % or more of the perfluoro(poly)ether group containing silane compound contained in the surface-treating agent is a compound wherein g is 2 or more.

Surface treating agent including perfluoro(poly)ether-group-containing silane compound

A surface-treating agent including at least one perfluoro(poly)ether group containing silane compound of the formula (1): wherein Rf, PFPE, Z, Q, R, R, X, Y, e, f, g, h and n are as defined herein. Also disclosed is a process for preparing the compound of formula (1).

An object of the present invention is to provide a novel substance that has a high reactivity as a fluorinating agent, is effectively used in various fluorination reactions, and is safely handled even in air. As the solution for achieving this object, the present invention provides a complex obtained by reacting bromine trifluoride with at least one metal halide selected from the group consisting of halogenated metals and halogenated hydrogen metals in a nonpolar solvent. This complex serves as a fluorinating agent that provides excellent fluorination performance and that is stable in air.

Fluorinating agent

The present invention provides a perfluoro(poly)ether group containing silane compound of(Rf-PFPE)-X&#x2014;(CRRR)&#x2003;&#x2003;(1a)(RRRC)&#x2014;X-PFPE-X&#x2014;(CRRR)&#x2003;&#x2003;(1b)wherein the symbols are as defined in the description.

An object of the present invention is to provide a process for producing &#x3b1;-fluoroacrylic acid esters at a high starting material conversion and a high yield. The present invention provides, as a means to achieve the object, a process for producing a compound represented by formula (1): wherein Rand Rare the same or different and each represent alkyl, fluoroalkyl, aryl optionally substituted with at least one substituent, halogen, or hydrogen; and Rrepresents alkyl, fluoroalkyl, or aryl optionally substituted with at least one substituent, the process comprising step A of reacting a compound represented by formula (2): wherein the symbols are as defined above, with carbon monoxide and an alcohol represented by formula (3):R&#x2014;OH&#x2003;&#x2003;(3)wherein the symbol is as defined above, in the presence of a transition metal complex catalyst containing at least one bidentate phosphine ligand and a base to thereby obtain the compound represented by formula (1).

Production method for alpha-fluoro acrylic acid esters

Object: An object of the present invention is to provide a method for producing, with a high yield, a fluorinated organic compound, the fluorinated organic compound having not been produced with a sufficient yield by a conventional method for producing a fluorinated organic compound using a fluorinating agent containing IF-pyridine-HF alone. Another object of the present invention is to provide a fluorinating reagent. Means for achieving the object: A method for producing a fluorinated organic compound comprising step A of fluorinating an organic compound by bringing the organic compound into contact with (1) IF-pyridine-HF and (2) at least one additive selected from the group consisting of amine hydrogen fluorides, XF (wherein Xrepresents hydrogen, potassium, sodium, or lithium), oxidizers, and reducing agents.

Growing community of inventors

Osaka, Japan

Takashi Namikawa