Rigaku Corporation

Takao Kinefuchi

Hiroshi Motono

Hideaki Takahashi

Kiyoshi Ogata

Kazuhiko Omote

Yoshiyasu Ito

Asao Nakano

Sei Yoshihara

Shigematsu Asano

Katsutaka Horada

Shiro Umegaki

Akifusa Higuchi

Licai Jiang

Boris Verman

Naoki Kawahara

Makoto Kambe

Ryotaro Yamaguchi

Atsunori Kiku

Muneo Yoshida

In an X-ray inspection device according to the present invention, an X-ray irradiation unitincludes a first X-ray optical elementfor focusing characteristic X-rays in a vertical direction, and a second X-ray optical elementfor focusing the characteristic X-rays in a horizontal direction. The first X-ray optical elementis constituted by a crystal material having high crystallinity. The second X-ray optical element includes a multilayer mirror.

X-ray inspecting device, X-ray thin film inspecting method, and method for measuring rocking curve

An X-ray thin film inspection device of the present invention includes an X-ray irradiation unitinstalled on a first rotation arm, an X-ray detectorinstalled on a second rotation arm, and a fluorescence X-ray detectorfor detecting fluorescence X-rays generated from an inspection target upon irradiation of X-rays. The X-ray irradiation unitincludes an X-ray optical elementcomprising a confocal mirror for receiving X-rays radiated from an X-ray tube, reflects plural focused X-ray beams monochromatized at a specific wavelength and focuses the plural focused X-ray beams to a preset focal point, and a slit mechanismfor passing therethrough any number of focused X-ray beams out of the plural focused X-ray beams reflected from the X-ray optical element

X-ray thin film inspection device

An X-ray thin film inspection apparatus including a sample table on which an inspection target such as a product wafer or the like is mounted, a positioning mechanism for moving the sample table, a goniometer having first and second swing arms, at least one X-ray irradiation unit that are mounted on the first swing arm and containing an X-ray tube and an X-ray optical element in a shield tube, an X-ray detector mounted on a second swing arm, and an optical camera for subjecting the inspection target disposed on the sample table to pattern recognition.

X-ray thin film inspection apparatus and thin film inspection apparatus and method for patterned wafer

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Tokyo, Japan

Takao Kinefuchi