Taiwan Memory Company

United Microelectronics Corp.

Tai-Sheng Feng

Le-Tien Jung

John Hsuan

A manufacturing method for a buried circuit structure includes providing a substrate having at least a trench formed therein, forming a firs conductive layer on the substrate blanketly, forming a patterned photoresist having a surface lower than an opening of the trench in the trench, removing the first conductive layer not covered by the patterned photoresist to form a second conductive layer having a top lower than an opening of the trench in the trench, removing the patterned photoresist, performing a dry etching process to remove the second conductive layer from the bottom of the trench to form a third conductive layer on the sidewalls of the trench, performing a selective metal chemical vapor deposition to form a metal layer having a surface lower than a surface of the substrate, and forming a protecting layer filling the trench on the metal layer.

Manufacturing method for a buried circuit structure

A manufacturing method for a buried circuit structure includes providing a substrate having at least a trench therein, forming a conductive layer having a top lower than an opening of the trench in the trench, performing a selective metal chemical vapor deposition (CVD) to form a metal layer having a top lower than the substrate in the trench, and forming a protecting layer filling the trench on the metal layer.

A semiconductor chip stack includes a first chip and a second chip. The first chip includes a first circuit formed in the first chip with a first integration density, and the second chip includes a second circuit in the second chip with a second integration density smaller than the first integration density. The first chip further includes at least a through-silicon via formed therein for electrically connecting the first chip and the second chip.

Growing community of inventors

Hsinchu, Taiwan

Tai-Sheng Feng