Korea Institute of Fusion Energy

Tai Hyeop Lho

Yong Ho Jung

Yong Sup Choi

Kang Il Lee

Seung Ryul Yoo

Dong Chan Seok

Soo Ouk Jang

A point etching module using an annular surface-discharge plasma apparatus is disclosed. The point etching module using an annular surface-discharge plasma apparatus comprises: a plate-shaped dielectric; a circular electrode disposed on and in contact with the upper surface of the dielectric; an annular electrode disposed on and in contact with the lower surface of the dielectric and providing a gas receiving space for receiving gas; and a power supplier for applying high voltage between the circular electrode and the annular electrode, wherein when the application of the high voltage starts an electric discharge, filament type plasma is irradiated toward a substrate to be treated, by using plasma flowing in the center direction of the annular electrode from between the inner surface of the annular electrode and the lower surface of the dielectric.

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Seoul, South Korea

Tai Hyeop Lho