Average Co-Inventor Count = 3.64
ph-index = 5
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Lam Research Corporation (10 from 3,768 patents)
2. Globalfoundries Inc. (6 from 5,671 patents)
3. Tokyo Electron Limited (2 from 10,295 patents)
17 patents:
1. 10503850 - Generation of a map of a substrate using iterative calculations of non-measured attribute data
2. 10215704 - Computed tomography using intersecting views of plasma using optical emission spectroscopy during plasma processing
3. 9401263 - Feature etching using varying supply of power pulses
4. 9252238 - Semiconductor structures with coplanar recessed gate layers and fabrication methods
5. 9147680 - Integrated circuits having replacement metal gates with improved threshold voltage performance and methods for fabricating the same
6. 9040380 - Integrated circuits having laterally confined epitaxial material overlying fin structures and methods for fabricating same
7. 9034767 - Facilitating mask pattern formation
8. 8940641 - Methods for fabricating integrated circuits with improved patterning schemes
9. 8912633 - In-situ photoresist strip during plasma etching of active hard mask
10. 8283255 - In-situ photoresist strip during plasma etching of active hard mask
11. 8124516 - Trilayer resist organic layer etch
12. 7782591 - Methods of and apparatus for reducing amounts of particles on a wafer during wafer de-chucking
13. 7470627 - Wafer area pressure control for plasma confinement
14. 7211518 - Waferless automatic cleaning after barrier removal
15. 7001529 - Pre-endpoint techniques in photoresist etching