Dnf Co., Ltd.

Other

Skc Co., Ltd.

Tae Seok Byun

Sang Ick Lee

Yong Hee Kwone

Sang Yong Jeon

Young Jae Im

Sang Chan Lee

Myong Woon Kim

Se Jin Jang

Sung Gi Kim

Joo Hyeon Park

Jeong Joo Park

In Kyung Jung

Seung Son

Joon Sung Ryou

Haengdon Lim

Yeong Hun Kim

Provided are a composition for depositing an antimony-containing thin film including a novel antimony compound which may be useful as a precursor of an antimony-containing thin film and a method for manufacturing an antimony-containing thin film using the same.

Composition for depositing antimony-containing thin film and method for manufacturing antimony-containing thin film using the same

Provided are an iodine-containing metal compound, a composition for depositing a metal-containing thin film including the same, and a method of manufacturing a metal-containing thin film using the same. Since the composition for depositing a thin film according to one embodiment is present in a liquid state at room temperature, it has excellent storage and handling properties, and since the composition has high reactivity, a metal thin film may be efficiently formed using the composition.

Iodine-containing metal compound and composition for depositing thin film including the same

Provided is a novel silylcyclodisilazane compound, a composition for depositing a silicon-containing thin film containing the same, and a method for manufacturing the silicon-containing thin film using the same, and since the silylcyclodisilazane compound of the present disclosure has high reactivity, thermal stability and high volatility, it can be used as a silicon-containing precursor, thereby manufacturing a high-quality silicon-containing thin film by various deposition methods.

Silylcyclodisilazane compound and method for manufacturing silicon-containing thin film using the same

The present invention relates to a novel multipurpose polymer and a composition containing the same. The polymer and the composition of the present invention are very useful for preparing a semiconductor device having very good mechanical and optical properties.

Polymer and composition containing same

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Daejeon, South Korea

Tae Seok Byun