Samsung Electronics Co., Ltd.

Tae-Ha Jun

Hee-Sun Chae

Jong-Hwan Weon

Kyung-Bo Sim

A method for preventing process errors in a semiconductor fabricating process allows only a few authorized engineers to release interlocks of semiconductor fabricating equipment when a count of interlock occurrences exceeds a predetermined number within a predetermined period of time. By allowing a semiconductor fabricating equipment operator only limited ability to reset equipment interlocks, repeated interlock conditions caused by test specification failures may be over-ridden only a predetermined number of times before the semiconductor fabricating equipment is disabled completely. The disabled semiconductor fabricating equipment may only be re-enabled using an authorization code, which is only made available to selected personnel, thereby ensuring that necessary repairs and corrections have been implemented on the semiconductor fabricating equipment.

Growing community of inventors

Suwon, South Korea

Tae-Ha Jun