Taiwan Semiconductor Manufacturing Comp. Ltd.

Szuya Liao

Wei-Yen Woon

Cheng-Yin Wang

Yi-Bo Liao

Kuan-Kan Hu

Ku-Feng Yang

Cheng-Ming Lin

Wei-Xiang You

Chi On Chui

Wei-Cheng Lin

Tai-Chun Huang

Shuen-Shin Liang

Cheng-Ting Chung

Ming-Chang Wen

Han-Yu Lin

Ming-Jie Huang

Ting-Gang Chen

Chen-Fong Tsai

Han-De Chen

Meng-Yu Lin

Jhih-Rong Huang

Wei-De Ho

Kenichi Sano

Wei-cheng Tzeng

Szu-Hua Chen

Sung-li Wang

Chun-fu Cheng

Hsin Yang Hung

Che Chi Shih

Tsung-Kai Chiu

Min-Chiang Chuang

Jui-Chen Huang

A method is provided that includes depositing a catalyst layer along a surface of the opening and performing a selectivity enhancement process. The selectivity enhancement process alters a deposition rate of a metal component on at least one region of the catalyst layer. The metal component is deposited on the catalyst layer. Exemplary selectivity enhancement processes include a self-assembled monolayer (SAM), introducing an accelerator, and/or introducing a suppressor.

Metal features of a semiconductor device and methods for forming the same

A semiconductor device includes a first memory cell and a second memory cell. The first memory cell is configured to store a first data bit at a first node when the first memory cell is turned on. The second memory cell is configured to store the first data bit when the first memory cell is turned off. The first memory cell comprises a first switch coupled to the first node, and the first switch is configured to transmit the first data bit to the second memory cell, and configured to be turned off when the first memory cell is turned off.

Semiconductor device and operating method thereof

An SRAM cell includes a first inverter cross-coupled to a second inverter. The first inverter includes a first pull-up transistor and a first pull-down transistor, having coupled drains that define a first storage node. The SRAM cell further includes a first N-type pass-gate transistor having a first drain coupled to a write bit line, a first source coupled to the first storage node, and a first gate coupled to a first write word line. The SRAM cell further includes a first P-type pass-gate transistor having a second drain coupled to the write bit line and a second source coupled to the first storage node. The SRAM cell further includes a P-type transistor having a third drain, coupled to a second gate of the first P-type pass-gate transistor, a third source coupled to a second write word line, and a third gate coupled to an enable signal.

Static random-access memory (SRAM) device and related SRAM-based compute-in-memory devices

A semiconductor device with isolation structures and a method of fabricating the same are disclosed. The semiconductor device includes first and second FETs, an isolation structure, and a conductive structure. The first FET includes a first fin structure, a first array of gate structures disposed on the first fin structure, and a first array of S/D regions disposed on the first fin structure. The second FET includes a second fin structure, a second array of gate structures disposed on the second fin structure, and a second array of S/D regions disposed on the second fin structure. The isolation structure includes a fill portion and a liner portion disposed between the first and second FETs and in physical contact with the first and second arrays of gate structures. The conductive structure is disposed in the liner portion and conductively coupled to a S/D region of the second array of S/D regions.

Isolation structures in semiconductor devices

A method for manufacturing a semiconductor device is provided. The method includes forming a first transistor over a substrate, wherein the first transistor comprises a first source/drain feature; depositing an interlayer dielectric layer around the first transistor; etching an opening in the interlayer dielectric layer to expose the first source/drain feature; conformably depositing a semimetal layer over the interlayer dielectric layer, wherein the semimetal layer has a first portion in the opening in the interlayer dielectric layer and a second portion over a top surface of the interlayer dielectric layer; and forming a source/drain contact in the opening in the interlayer dielectric layer.

Semiconductor device and manufacturing method thereof

A semiconductor device includes a fin, first source/drain regions, second source/drain regions, a first nanosheet, a second nanosheet and a metal gate structure. The fin extends in a first direction and protrudes above an insulator. The first source/drain regions are over the fin. The second source/drain regions are over the first source/drain regions. The first nanosheet extends in the first direction between the first source/drain regions. The second nanosheet extends in the first direction between the second source/drain regions. The metal gate structure is over the fin and between the first source/drain regions. The metal gate structure extends in a second direction different from the first direction from a first sidewall to a second sidewall. A first distance in the second direction between the first nanosheet and the first sidewall is smaller than a second distance in the second direction between the first nanosheet and the second sidewall.

Semiconductor device and method of manufacture

A semiconductor device having a low-k isolation structure and a method for forming the same are provided. The semiconductor device includes channel structures, laterally extending on a substrate; gate structures, intersecting and covering the channel structures; and a channel isolation structure, laterally penetrating through at least one of the channel structures, and extending between separate sections of one of the gate structures along an extending direction of the one of the gate structures. A low-k dielectric material in the channel isolation structure comprises boron nitride.

Semiconductor device having isolation structure formed of low-k dielectric material and method for forming the same

The present disclosure provides a method that includes providing a semiconductor structure having a bottom channel region and a top channel region over the bottom channel region; forming a gate dielectric layer over and wrapping around top channels in the top channel region; performing a radical treatment on the dielectric layer in a supercritical fluid; and forming a metal gate electrode on the dielectric layer.

Radical treatment in supercritical fluid for gate dielectric quality improvement to CFET structure

Bonding and isolation techniques for stacked device structures are disclosed herein. An exemplary method includes forming a first insulation layer on a first device component, forming a second insulation layer on a second device component, and bonding the first insulation layer and the second insulation layer. The bonding provides a stacked structure that includes the first device component over the second device component, and an isolation structure (formed by the first insulation layer bonded to the second insulation layer) therebetween. The isolation structure includes a first portion having a first composition and a second portion having a second composition different than the first composition. The method further includes processing the stacked structure to form a first device disposed over a second device, where the isolation structure separates the first device and the second device. The first insulation layer and the second insulation layer may include the same or different materials.

Bonding and isolation techniques for stacked transistor structures

A method includes forming Complementary Field-Effect Transistors including a lower transistor comprising a lower source/drain region, and an upper transistor including an upper source/drain region. An upper dielectric layer over the upper source/drain region and a lower dielectric layer under the upper source/drain region are etched to form an opening. A sidewall of the upper source/drain region and a top surface of the lower source/drain region are exposed to the opening. An epitaxy process is performed to form a first semiconductor layer on the sidewall of the upper source/drain region, and a second semiconductor layer on the top surface of the lower source/drain region. The first semiconductor layer is then removed. A contact plug is formed in the opening to electrically connects the upper source/drain region to the second semiconductor layer and the lower source/drain region.

Selective epitaxy process for the formation of CFET local interconnection

A method includes forming a first transistor and a second transistor over a semiconductor substrate, wherein the first transistor and the second transistor are vertically stacked. The method further includes exposing a backside of a first gate stack of the first transistor; forming a backside gate etch stop layer (ESL) on the backside of the first gate stack; patterning a contact opening through the backside gate ESL to expose the first gate stack; and forming a backside gate contact in the contact opening. The backside gate contact extends through the backside gate ESL to electrically connect to the first gate stack.

Backside gate contact, backside gate etch stop layer, and methods of forming same

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Zhubei, Taiwan

Szuya Liao