Essilor International (compagnie Generale D'optique)

Unity Semiconductor Corporation

Centre National De La Recherche Scientifique

Essilor International

Sylvain Perrot

Benjamin Rousseau

Thierry Bonnin

Gilles Fresquet

Jean Taboury

Raymond Mercier

An imaging device is provided for localizing structures through the surface of an object such as a wafer, with a view to positioning a measuring sensor relative to the structures, includes: (i) an imaging sensor; (ii) an optical imager able to produce, on the imaging sensor, an image of the object in a field of view; and (iii) an illuminator for generating an illuminating beam and lighting the field of view in reflection, in which the illuminating beam and lighting the field of view in reflection, in which the illuminator is able to generate an illuminating beam the spectral content of which is adapted to the nature of the object, such that the light of the beam is able to essentially penetrate into the object. Also provided is a system and a method for carrying out dimensional measurements on an object such as a wafer.

Device and method for making dimensional measurements on multilayer objects such as wafers

An imaging method and device is provided for inspecting for the presence, in an object like a wafer, of enclosed structures, such as vias, employing: an imaging sensor; an optical imager able to produce, on the imaging sensor, an object image in a field of view; and an illuminator for generating an illuminating beam and lighting the field of view in reflection, including: acquiring a first image of the object by illuminating the object with a first illuminating beam adapted to the object, such that the light of the beam penetrates the object; acquiring a second image of the object by illuminating the object with a second illuminating beam adapted to the object, such that the light of the beam is reflected by the surface of the object; and comparing the first and second images to identify structures that appear in the first image but not in the second image.

Method and device for controllably revealing structures buried in objects such as wafers

A linear fluidic actuator comprising an upper actuation deformable surface suitable to induce a displacement in an actuation direction L and a wall delimiting an internal cavity wherein the shape of the actuator is a pillar; the wall, the cavity and the upper surface of a base form the lower part of said pillar, where his the highest dimension of the internal cavity at rest according to the actuation direction L; a part forms the upper part of said pillar where the upper surface of said upper part is the upper actuation deformable surface, the bottom surface of said upper part closes the upper part of the cavity so as to form an upper surface of said cavity and where his the distance at rest from the top of the upper surface of the internal cavity to the upper actuation deformable surface; the height ratio h/his comprised between 0.2 and 10; a fluidic inlet is provided and suitable for introducing a fluid in the internal cavity.

Linear fluidic actuator

An adjustable optical device comprising at least a deformable optical surface activated by linear fluidic actuators comprising: a material layer comprising an upper surface on which the optical surface is provided and a bottom surface; an actuator layer comprising a plurality of linear fluidic actuators separated by at least one cavity, where at least one linear fluidic actuator is a pillar extending in the actuation direction (L) which is non parallel to the bottom surface of the material layer, said pillar comprising a wall delimiting an internal cavity and where an upper surface of said pillar is continuously linked to a zone of the bottom surface of the material layer; fluidic inlets suitable for introducing a fluid in at least one internal cavity of a pillar linear fluidic actuator.

Growing community of inventors

Palaiseau, France

Sylvain Perrot