Siemens Aktiengesellschaft

Susanne Kornely

Carsten Schuh

Axel Ganster

Jörg Zapf

Andreas Wolff

Markus Schieber

Andreas Lenk

Stefan Denneler

Daniel Sickert

Hans Meixner

Bertrand Lemire

Hermann Leiderer

Dieter Hahn

Andreas Mantovan

Birgitta Hacker

A microscreen, substantially formed of a photoresist material, is produced by applying a photoresist layer to a support using a liquid photoresist, partially covering the photoresist layer with a mask that defines the structure of the microscreen, exposing the photoresist to radiation, developing the photoresist, and removing the photoresist from the support.

Method for producing a microscreen

A method produces a microscreen by providing a support and applying a photoresist layer with a definable thickness to the support. The photoresist is exposed by radiation using a mask that defines the structure of the microscreen. The photoresist is then developed. The thickness of the photoresist layer is selected such that, in a sub-region of the photoresist layer, the radiation used for the exposure penetrates only so slightly that practically no cross-linking of the photoresist takes place.

The embodiments relate to a piezoelectric component including at least one fully active piezoelectric element comprising electrode layers and piezoelectric layers arranged therebetween. The electrode layers are conveyed to a lateral edge of the piezoelectric element and contacted there. The external electrode is attached in a structured fashion for electrical contacting and/or a structured external electrode is made available: The external electrode essentially includes two components, namely the contacting field and the contacting path. In the event of several piezoelectric elements (piezoelectric actuator in multilayer structure) stacked one above the other, the contacting path functions as a collector electrode, which connects the contacting fields of the piezoelectric elements to one another. The insulation path exists for the electrical insulation of the contacting path from electrode layers which are not to be contacted. A reliable contacting of the electrode layers is possible with the structure according to the invention. A fully active, piezoceramic multilayer actuator with the described contacting is used in automotive engineering for activating fuel injection valves.

Piezoelectric component with directly structured external contacting, method for manufacturing the component and use of said component

A piezoelectric component with at least one fully active piezoelement has electrode layers and interposed piezoelectric layers guided to a lateral edge of the piezoelement and contacted there. An insulating layer applied for electric contacting has an electric through-plating. An electrically conductive gas-phase deposition layer is applied directly to the electrode layer guided up to the lateral surface of the piezoelement by way of deposition from the gas phase in order to improve electric contacting. An external electrode is applied to the gas-phase deposition layer. In the case of several superposed stacked piezoelements (piezoactuator in multi-layer design), the external electrode functions as a collector electrode which connects the electrode layers to each other. The structure enables secure contacting of the electrode layers. A fully active piezoceramic multi-layer actuator with the described contacting may be used in automobile technology for activating fuel-injection valves.

Piezoelectric component with outer contacting, having gas-phase deposition, method for manufacturing component and use of component

According to various production methods for producing a piezoceramic multilayer actuator, in the course of the production method, multilayer locks () are electrochemically or mechanically processed in such a way that a recess structure is obtained. The lateral surfaces () of the electrodes () inside these recesses are electrically insulated using the slip casting method in order to be able to contact the remaining electrodes by imprinting an outer metallization.

Piezoceramic multilayer actuator and method for the production thereof

A porous Al.sub.2 O.sub.3 thick film covers the SrTiO.sub.3 layer of an oxygen sensor, said SrTiO.sub.3 layer being contacted by means of two Pt electrodes and deposited on an Al.sub.2 O.sub.3 substrate. The electrically insulating Al.sub.2 O.sub.3 layer bears a protective layer, which is exposed to the exhaust gas and is preferably also made of SrTiO.sub.3. This construction ensures that the output signal of the sensor representing the oxygen partial pressure then depends only on the resistance or, respectively, conductivity value of the non-contaminated SrTiO.sub.2 sensor layer.

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Munich, Germany

Susanne Kornely