Applied Materials, Inc.

International Business Machines Corporation

Steven Reiter

Daniel C Edelstein

Alfred Grill

Juan Carlos Rocha-Alvarez

Stephen McConnell Gates

Ganesh Balasubramanian

Deenesh Padhi

Bok Hoen Kim

Hichem M'Saad

Alexandros T Demos

Zhenjiang Cui

Kang Sub Yim

Darryl D Restaino

Annamalai Lakshmanan

Steven E Molis

Francimar Campana Schmitt

Vu Ngoc Tran Nguyen

Disclosed is a structure and method for forming a structure including a SiCOH layer having increased mechanical strength. The structure includes a substrate having a layer of dielectric or conductive material, a layer of oxide on the layer of dielectric or conductive material, the oxide layer having essentially no carbon, a graded transition layer on the oxide layer, the graded transition layer having essentially no carbon at the interface with the oxide layer and gradually increasing carbon towards a porous SiCOH layer, and a porous SiCOH (pSiCOH) layer on the graded transition layer, the porous pSiCOH layer having an homogeneous composition throughout the layer. The method includes a process wherein in the graded transition layer, there are no peaks in the carbon concentration and no dips in the oxygen concentration.

Structure and method for porous SiCOH dielectric layers and adhesion promoting or etch stop layers having increased interfacial and mechanical strength

A method of depositing a organosilicate dielectric layer exhibiting high adhesion strength to an underlying substrate disposed within a single processing chamber without plasma arcing. The method includes positioning a substrate within a processing chamber having a powered electrode, flowing an interface gas mixture into the processing chamber, the interface gas mixture comprising one or more organosilicon compounds and one or more oxidizing gases, depositing a silicon oxide layer on the substrate by varying process conditions, wherein DC bias of the powered electrode varies less than 60 volts.

Interface engineering to improve adhesion between low k stacks

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Santa Clara, CA, United States of America

Steven Reiter