Pri Automation, Inc.

Steven J Remis

Rodney C Ow

Martin P Aalund

Steve Reyling

J Rafael Gomez

Lang Van Nugyen

Craig Chidlow

A substrate handling system with integrated door removal assembly for an environmentally controlled substrate processing chamber is provided. The system includes a robot positioned within the chamber. A drive mechanism is connected to the robot. A door interface mechanism is attached to the drive mechanism and includes a door key and a door key control assembly. The drive mechanism provides mechanical control of the door key control assembly such that that door key is manipulated to couple a substrate carrier door to a port door. The coupled doors are storable within the chamber or on the robot. The drive mechanism may also include a substrate end effector, thereby allowing the robot to transport substrates within the chamber. The robot is movable within the chamber to multiple processing stations.

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Sunnyvale, CA, United States of America

Steven J Remis