Average Co-Inventor Count = 2.86
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Carl Zeiss Smt Gmbh (2 from 1,409 patents)
2 patents:
1. 11899358 - Method for measuring photomasks
2. 10380733 - Method and apparatus for determining the position of structure elements of a photolithographic mask