Vistec Semiconductor Systems Gmbh

Steffen Gerlach

Detlef Michelsson

Bernd Jungmann

A method of determining defects in a plurality of images having essentially the same image contents is disclosed. A comparison operation is carried out once three fully comparable images having essentially the same image contents are present in the intermediate memory. The stored individual images are accessed randomly. A paired comparison operation between the three difference images is carried out.

Detecting defects by three-way die-to-die comparison with false majority determination

A method for measuring overlay shift is disclosed. An image is acquired of at least one reference element that comprises at least one first pattern element in a first plane and at least one second pattern element in a second plane. An image of a measurement element is likewise acquired. The shift value between the reference element and measurement element is ascertained by comparing the image of the reference element with the image of the measurement element. An output on a user interface indicates whether a predefined tolerance value is being exceeded.

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Giessen, Germany

Steffen Gerlach