Carl Zeiss Smt Gmbh

Vodafone Holding Gmbh

Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Intelligente Sensorsysteme Dresden Gmbh

Stefan Krone

Lars Berger

Jan Horn

Gerhard P Fettweis

Johannes Eisenmenger

Markus Holz

Eckhard Ohlmer

Michael Lentmaier

Joerg Specht

Walter Nitzold

Volker Wieczorek

Matthias Böhm

Stefan Woschech

Ralf Kiesel

Andreas Schroth

Paul Wijlaars

Nicola Michailow

Thomas Wolfsteiner

Peter König

Trevor Gill

Gerhardt Fettweis

A control device actuates actuator unit to set a position of an optical element of a lithography system. The control device includes an amplifier unit for providing a control signal for the actuator unit via a voltage signal and a PWM signal. The PWM signal has a duty factor and a clock frequency. The control device also includes a modulator unit designed to provide the PWM signal having the duty factor and a defined clock frequency from a plurality of defined clock frequencies. A defined clock frequency of the plurality of defined clock frequencies is an integer multiple of a basic clock frequency. The basic clock frequency is in the range of 10 kHz to 1 MHz.

Control device for actuating an actuator unit of a lithography system, lithography system having a control device, and method for operating the control device

A component for a projection exposure apparatus includes a printed circuit board arranged in an encapsulated housing and having electronic component parts, and a heat conducting structure for dissipating heat from the electronic component parts to an outer side of the housing.

Component for a projection exposure apparatus

A sensor arrangement includes at least one position sensor apparatus for providing a position signal for a mirror and an evaluation apparatus for ascertaining the position of the mirror depending on the position signal.

Sensor assembly and method for determining respective positions of a number of mirrors of a lithography system

Sensor arrangements, methods for ascertaining a respective position of a number of mirrors of a lithography apparatus, projection systems of a lithography apparatus, and lithography apparatus are disclosed. The sensor arrangement includes at least one position sensor apparatus for providing a position signal for a mirror and an evaluation apparatus for ascertaining the position of the mirror depending on the position signal.

An external facility is used to control positioning of multiple displaceable mirror elements of a multi-mirror arrangement. The external facility is to a multi-mirror arrangement via a data channel having a bandwidth of at least 1 kHz per controlled degree of freedom of displacement.

Device and method for controlling positioning of multiple adjustable mirror elements in a multi-mirror arrangement

A method for displacing an optical component is disclosed, in which the electrical power maximally required when displacing the component is less than the sum of the maximum electrical powers of the at least two actuators used for the displacement.

Method for displacing at least one optical component

A radio communication method and a corresponding system are described. Time frequency resources are divided into a grid of resources. For communicating with a plurality of non-synchronized terminals the timing offset of each terminal is measured and a joint message is asynchronously transmitted to a subset of terminals, wherein the subset comprises at least two terminals.

Method for reduced resource usage in system synchronization, data delivery and asynchronous real-time access mobile communications systems with multiple low complexity terminals

A method and corresponding devices for processing and transmitting information are described. A sequence of binary signals is mapped to symbols that forms a two-dimensional matrix of symbols in one of the frequency-time or time-time or time-frequency or frequency-frequency domain and which may be filtered in that domain. Selecting the diagonal elements of said matrix forms a transmit vector.

Method and transmitter/receiver for data transmission with flexible exploitation of time and frequency diversity

In a method for detecting an offset drift in a resistive Wheatstone measuring bridge, a switch is made between a measuring mode and a testing mode without interfering in the internal structure of the measuring bridge. In testing mode, two sensor resistors that act in the same way and lie in different bridge arms in the measuring mode are connected in series, and a voltage level occurring in the connection of these sensor resistors is compared with a reference voltage. Preferably the sensor resistor that acts in a different way and lies between the two series-connected sensor resistors acting in the same way is bridged. The reference voltage is advantageously formed by resistive division of the voltage applied to the series connection of the sensor resistors. The testing mode may expediently be switched in such a way that the two pairs of sensor resistors acting in the same way are respectively tested in succession.

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Aalen, Germany

Stefan Krone