Average Co-Inventor Count = 4.55
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Applied Materials, Inc. (36 from 13,684 patents)
36 patents:
1. 12437999 - Methods and apparatus for mask patterning debris removal
2. 12068159 - Methods and apparatus for mask patterning debris removal
3. 11871667 - Methods and apparatus for warpage correction
4. 11739411 - Lattice coat surface enhancement for chamber components
5. 11721583 - Mainframe-less wafer transfer platform with linear transfer system for wafer processing modules
6. 11421316 - Methods and apparatus for controlling warpage in wafer level packaging processes
7. 11342226 - Hybrid wafer dicing approach using an actively-focused laser beam laser scribing process and plasma etch process
8. 11309278 - Methods for bonding substrates
9. 11302549 - Substrate vacuum transport and storage apparatus
10. 11177146 - Methods and apparatus for processing a substrate
11. 11111583 - Substrate carrier system utilizing electrostatic chucking to accommodate substrate size heterogeneity
12. 11053590 - Nozzle for uniform plasma processing
13. 10978334 - Sealing structure for workpiece to substrate bonding in a processing chamber
14. 10930542 - Apparatus for handling various sized substrates
15. 10903055 - Edge ring for bevel polymer reduction