Samsung Electronics Co., Ltd.

Other

Soon-Moon Jung

Jae-hoon Jang

Hoon Lim

Jae-Hun Jeong

Jong-Hyuk Kim

Won-seok Cho

Young-Chul Jang

Won-Seok Cho

Han-Byung Park

Ki-Nam Kim

Jae-Hoon Jang

Kun-Ho Kwak

Han-Soo Kim

Hoo-Sung Cho

Min-Sung Song

Jun-Beom Park

Jae-Joo Shim

Yang-Soo Son

Sung-Jin Kim

Byung-Jun Hwang

Young-seop Rah

Sung-Bong Kim

Hyung-Shin Kwon

Gong-Heum Han

Bo-Tak Lim

Chang-Min Hong

Hyou-Youn Nam

Jong-In Yun

Sung-jin Kim

Wonseok Cho

Han-soo Kim

Jonghyuk Kim

Sung-bong Kim

Cha-Dong Yeo

Young-Seop Rah

YoungSeop Rah

Jang Young Chul

Byoung-Keun Son

Jin-Ho Kim

Jae-Kwan Park

Sang-Pil Sim

Chan-Kwang Park

Wook-Hyun Kwon

Myang-Sik Han

Jae-Kyun Park

Gyu-Ho Lyu

Mi-So Hwang

A semiconductor device includes a semiconductor substrate including a first region having a cell region and a second region having a peripheral circuit region, first transistors on the semiconductor substrate, a first protective layer covering the first transistors, a first insulation layer on the first protective layer, a semiconductor pattern on the first insulation layer in the first region, second transistors on the semiconductor pattern, a second protective layer covering the second transistors, the second protective layer having a thickness greater than that of the first protective layer, and a second insulation layer on the second protective layer and the first insulation layer of the second region.

Method for forming semiconductor device having metallization comprising select lines, bit lines and word lines

On embodiment of a contact structure may include a lower insulation layer on a lower substrate, an upper substrate on the lower insulation layer, a groove penetrating the upper substrate to extend into the lower insulation layer, the groove below an interface between the upper substrate and the lower insulation layer, an upper insulation layer in the groove, and a contact plug penetrating the upper insulation layer in the groove to extend into the lower insulation layer.

Contact structures in substrate having bonded interface, semiconductor device including the same, methods of fabricating the same

A semiconductor device and a method of forming the same are provided. The method includes preparing a semiconductor substrate. Insulating layers may be sequentially formed on the semiconductor substrate. Active elements may be formed between the insulating layers. A common node may be formed in the insulating layers to be electrically connected to the active elements. The common node and the active elements may be 2-dimensionally and repeatedly arranged on the semiconductor substrate.

Method of forming semiconductor device having common node that contacts plural stacked active elements and that has resistive memory elements corresponding to the active elements

A nonvolatile memory device includes a semiconductor substrate having a first well region of a first conductivity type, and at least one semiconductor layer formed on the semiconductor substrate. A first cell array is formed on the semiconductor substrate, and a second cell array formed on the semiconductor layer. The semiconductor layer includes a second well region of the first conductivity type having a doping concentration greater than a doping concentration of the first well region of the first conductivity type. As the doping concentration of the second well region is increased, a resistance difference may be reduced between the first and second well regions.

Multi-layer memory devices

One embodiment exemplarily described herein can be generally characterized as a semiconductor device that includes a lower level device layer located over a semiconductor substrate, an interlayer insulating film located over the lower level device layer and an upper level device layer located over the interlayer insulating film. The lower level device layer may include a plurality of devices formed in the substrate. The upper level device layer may include a plurality of semiconductor patterns and at least one device formed in each of the plurality of semiconductor patterns. The plurality of semiconductor patterns may be electrically isolated from each other. Each of the plurality of semiconductor patterns may include at least one active portion and at least one body contact portion electrically connected to the at least one active portion.

Semiconductor device having driving transistors

An interconnection structure and an electronic device employing the same are provided. The interconnection structure for an integrated structure includes first and second contact plugs disposed on a substrate, and a connection pattern interposed between sidewalls of the first and second contact plugs and configured to electrically connect the first and second contact plugs.

Interconnection structure and electronic device employing the same

In multiple-layered memory devices, memory systems employing the same, and methods of forming such devices, a second memory device layer on a first memory device layer comprises a second substrate including a second memory cell region. The second substrate includes only a single well in the second memory cell region, the single well of the second memory cell region comprising a semiconducting material doped with impurity of one of a first type and second type. The single well defines an active region in the second memory cell region of the second substrate. Multiple second cell strings are arranged on the second substrate in the second active region. Although the second memory cell region includes only a single well, during a programming or erase operation of the memory cells of the second layer, requiring a high voltage to be applied to the single well in the substrate of the second layer, the high voltage will not interfere with the operation of the peripheral transistors of the first layer, second layer, or other layers, since they are isolated from each other. As a result, the substrate of the second layer can be prepared to have a thinner profile, and with fewer processing steps, resulting in devices with higher-density, greater reliability, and reduced fabrication costs.

Multiple-layer non-volatile memory devices, memory systems employing such devices, and methods of fabrication thereof

A stack-type semiconductor device and a method of manufacturing the same are provided. The stack-type semiconductor device includes an insulation layer on a single-crystalline substrate, a contact plug penetrating the insulation layer to contact the single-crystalline substrate, an upper semiconductor pattern including an impurity region and a gate structure positioned between the impurity regions on the upper semiconductor pattern. An upper surface of the contact plug contacts a lower surface of the semiconductor pattern. An operation failure of the stack-type semiconductor device is reduced since the upper semiconductor pattern is electrically connected to the single-crystalline semiconductor substrate.

Stack-type semiconductor device

A one transistor DRAM device includes: a substrate with an insulating layer, a first semiconductor layer provided on the insulating layer and including a first source region and a first region which are in contact with the insulating layer and a first floating body between the first source region and the first drain region, a first gate pattern to cover the first floating body, a first interlayer dielectric to cover the first gate pattern, a second semiconductor layer provided on the first interlayer dielectric and including a second source region and a second drain region which are in contact with the first interlayer dielectric and a second floating body between the second source region and the second drain region, and a second gate pattern to cover the second floating body.

Methods of forming one transistor DRAM devices

A semiconductor device includes a body region having a source region, a drain region, a channel region interposed between the source region and the drain region, and a body region extension extending from an end of the channel region. A gate pattern is formed on the channel region and the body region, and a body contact connects the gate pattern to the body region. A sidewall of the body region extension is self-aligned to a sidewall of the gate pattern. Methods of forming semiconductor devices having a self-aligned body and a body contact are also disclosed.

Methods of forming semiconductor devices having self-aligned bodies

Provided is a non-volatile memory device including first and second, vertically stacked semiconductor substrates, a plurality of non-volatile memory cell transistors formed in a row on the first and second semiconductor substrates, and a plurality of word lines connected to gates of the plurality of non-volatile memory cell transistors. The plurality of non-volatile memory cell transistors are grouped into two or more memory cell blocks, such that a first voltage is applied to the first semiconductor substrate including a first memory cell block to be erased, and either (1) a second voltage less than the first voltage and greater than 0V is applied to the second semiconductor substrate not including the first memory cell block, or (2) the second semiconductor substrate not including the first memory cell block is allowed to electrically float.

Non-volatile memory device and erase method

An SRAM device includes a substrate having at least one cell active region in a cell array region and a plurality of peripheral active regions in a peripheral circuit region, a plurality of stacked cell gate patterns in the cell array region, and a plurality of peripheral gate patterns disposed on the peripheral active regions in the peripheral circuit region. Metal silicide layers are disposed on at least one portion of the peripheral gate patterns and on the semiconductor substrate near the peripheral gate patterns, and buried layer patterns are disposed on the peripheral gate patterns and on at least a portion of the metal silicide layers and the portions of the semiconductor substrate near the peripheral gate patterns. An etch stop layer and a protective interlayer-insulating layer are disposed around the peripheral gate patterns and on the cell array region. Methods of forming an SRAM device are also disclosed.

Methods of forming SRAM devices having buried layer patterns

A non-volatile memory device includes first and second strings memory cell transistors, related first and second word lines respectively connected to gates of the first string memory cell transistors, wherein respective first and second word lines are connected to commonly receive a bias voltage. The non-volatile memory device also includes dummy cell transistors connected to the first and second strings, and first and second dummy word lines configured to receive different bias voltages.

Non-volatile memory device and method of operating the same

Semiconductor device and method of forming the same

Growing community of inventors

Gyeonggi-do, South Korea

Soon-Moon Jung