National Science Council

Solomon J H Lee

Chih-Kung Lee

Shu-Sheng Lee

Shuen-Chen Shiue

Shih-Jui Chen

Lin Chan-Ching

Yang Yun-Chang

Tony C H Lin

An ellipsometer for measuring the complex refractive index of a sample and thin film thickness according to the invention. The ellipsometer includes a linear polarized light source, a reference analyzer, a polarization analyzer and a light direction controller. The linear polarized light source used to generate a measuring beam for detecting the sample. The phase modulator used to control the phase of the measuring beam thereby to generate a sampling beam. The reference analyzer used to generate a reference beam according to part of the sampling beam thereby to adjust the intensity of the sampling beam. The polarization analyzer used to analyze the phase, polarization and intensity of the sampling beam after the sampling beam is reflected by the sample. The light direction controller used to control the angle and direction of the sampling beam with respect to the sample, wherein the sampling beam is reflected by the sample to enter the light direction controller, and thereafter the sampling beam is reflected by the light direction controller and re-reflected by the sample to enter the polarization analyzer along an original optical path, but toward an opposite direction.

Device for measuring the complex refractive index and thin film thickness of a sample

An optical path overlapping type incident angle changeable optical mechanism according to the invention allows an incident light beam to be incident onto a measured range of a sample within a large incident angle range. The optical mechanism includes a reflecting prism reflecting the incident light beam to generate a reflected light beam having an angle of 90&deg; with respect to the incident light beam; a concave parabolic cylindric mirror guiding the reflected light beam coming from the reflecting prism to a measured range of a detect-waiting sample to thereby be further reflected to generate a detect-waiting light beam; a concave cylindric mirror used to make the detect-waiting light beam incident onto/reflected by the reflecting prism so as to overlap with the incident light beam; and a light beam splitting means used to separate the detect-waiting light beam from the incident light beam.

Optical mechanism for precisely controlling the angle of an incident light beam within a large incident angle range

Growing community of inventors

Taipei, Taiwan

Solomon J H Lee