Applied Materials, Inc.

Siva Chandrasekar

Juan Carlos Rocha-Alvarez

Jeffrey C Hudgens

Anantha K Subramani

Charles T Carlson

Jason M Schaller

Benjamin B Riordon

Paul Zachary Wirth

Dmitry A Dzilno

Vinay K Prabhakar

Satish Radhakrishnan

Sumit Agarwal

Viren Kalsekar

Paul Forderhase

Gary Wyka

Yang Guo

Michael Carrell

Mitchell DiSanto

Venkata Raghavaiah Chowdhary Kode

Rajath Kumar Lakkenahalli Hiriyannaiah

Exemplary substrate processing systems may include chamber body defining a transfer region. The systems may include a lid plate seated on the chamber body. The lid plate may define a first plurality of apertures through the lid plate and a second plurality of apertures through the lid plate. The systems may include a plurality of lid stacks equal to a number of apertures of the first plurality of apertures defined through the lid plate. Each lid stack of the plurality of lid stacks may include a choke plate seated on the lid plate along a first surface of the choke plate. The choke plate may define a first aperture axially aligned with an associated aperture of the first plurality of apertures. The choke plate may define a second aperture axially aligned with an associated aperture of the second plurality of apertures.

Thermally controlled lid stack components

A method includes receiving one or more parameters associated with a plurality of metal plates. The method further includes determining, based on the one or more parameters, a plurality of predicted deformation values associated with the plurality of metal plates. Each of the plurality of predicted deformation values correspond to a corresponding metal plate of the plurality of metal plates. The method further includes causing, based on the plurality of predicted deformation values, the plurality of metal plates to be diffusion bonded to produce a bonded metal plate structure.

Fabricating a recursive flow gas distribution stack using multiple layers

Substrate transfer structure

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Hosur, India

Siva Chandrasekar