Hitachi, Ltd.

Shuichi Hanashima

Masao Sakata

Seiji Ishikawa

Yuzo Taniguchi

Sadao Shimoyashiro

Isao Miyazaki

Hiroto Nagatomo

Kazuhiko Matsuoka

Jun Nakazato

Kimio Muramatsu

Yuichi Ohyama

Osamu Satou

Yuzaburo Sakamoto

Tsutomu Okabe

Taizo Hashimoto

Yutaka Ebara

Ryuichi Kyomasu

Yoshikazu Suzumura

The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.

Inspection data analyzing system

The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.

Inspection system and method using separate processors for processing different information regarding a workpiece such as an electronic device

Disclosed is a control circuit of a positioning device for moving a member to be controlled to a predetermined position by using a d-c motor, in which there are used arithmetic circuit means for detecting a difference signal, to be converted to a driving signal of the motor, between the position detecting signal of the member and the reference signal of the predetermined position, and correcting circuit means coupled to the arithmetic circuit means for causing the difference signal to be small, whereby the motor is free from the hunting phenomenon.

Control circuit for a positioning device using a d-c motor

Growing community of inventors

Tokyo, Japan

Shuichi Hanashima