Toyoda Gosei Co., Ltd.

Nagoya University

Tokai National Higher Education and Research System

Shugo Nitta

Hiroshi Amano

Naoki Fujimoto

Yoshio Honda

Koji Okuno

Yoshiki Saito

Kentaro Nagamatsu

Yasuhisa Ushida

Yuki Amano

Naoyuki Nakada

Atsushi Miyazaki

Daisuke Shinoda

Shinya Boyama

Kazuki Onishi

A vapor phase epitaxial growth device comprises a reactor vessel and a wafer holder arranged within the reactor vessel. The wafer holder includes a wafer holding surface configured to hold a wafer with a wafer surface oriented substantially vertically downward. The device comprises a first material gas supply pipe configured to supply a first material gas and arranged below the wafer holding surface. The device comprises a second material gas supply pipe configured to supply a second material gas and arranged below the wafer holding surface. The device comprises a gas exhaust pipe configured to exhaust gases and arranged below the wafer holding surface. A distance between the gas exhaust pipe and an axis line passing through a center of the wafer holding surface is greater than distances between the axis line and each of the first material gas supply pipe and the second material gas supply pipe.

Vapor phase epitaxial growth device

A gallium nitride vapor phase epitaxy apparatus capable of doping magnesium is provided. The apparatus is used in vapor phase epitaxy not using organic metal as a gallium raw material. The apparatus comprises a reactor vessel and a wafer holder. The apparatus comprises a first raw material gas supply pipe configured to supply a first raw material gas containing gallium. The apparatus comprises a second raw material gas supply pipe configured to supply a second raw material gas, which contains nitrogen and configured to react with the first raw material gas. The apparatus comprises a third raw material gas supply pipe configured to supply a third raw material gas containing magnesium. The third raw material gas supply pipe is configured capable of placing a magnesium-based oxide on its supply path. The apparatus comprises a first heating unit configured to heat the magnesium-based oxide in a first temperature range.

Gallium nitride vapor phase epitaxy apparatus used in vapor phase epitaxy not using organic metal as a gallium raw material and manufacturing method therefor

A vapor phase epitaxial growth device comprises a reactor vessel. The device comprises a wafer holder arranged in the reactor vessel. The device comprises a first material gas supply pipe configured to supply first material gas to the reactor vessel. The device comprises a second material gas supply pipe configured to supply second material gas, which is to react with the first material gas, to the reactor vessel. The device comprises a particular gas supply pipe having a solid unit arranged on a supply passage. The device comprises a first heater unit configured to heat the solid unit to a predetermined temperature or higher. The solid unit comprises a mother region and a first region arranged continuously within the mother region. The mother region is a region that does not decompose at the predetermined temperature. The first region is a region that decomposes at the predetermined temperature and contains Mg.

A method for producing a Group III nitride semiconductor light-emitting device includes an n-type layer, a light-emitting layer, and a p-type layer, each of the layers being formed of Group III nitride semiconductor, being sequentially deposited via a buffer layer on a textured sapphire substrate. A buried layer is formed of Group III nitride semiconductor on the buffer layer, at a temperature lower by 20&#xb0; C. to 80&#xb0; C. than the temperature of 1000&#xb0; C. to 1200&#xb0; C. when the n-type layer is deposited on the buried layer. The texture provided on the sapphire substrate may have a depth of 1 &#x3bc;m to 2 &#x3bc;m and a side surface inclined by 40&#xb0; to 80&#xb0;. A preventing layer may be formed of GaN at 600&#xb0; C. to 1050&#xb0; C. so as to cover the entire top surface of the buffer layer.

Method for producing group III nitride semiconductor light-emitting device

On a light-emitting layer, a p cladding layer of AlGaInN doped with Mg is formed at a temperature of 800&#xb0; C. to 950&#xb0; C. Subsequently, on the p cladding layer, a capping layer of undoped GaN having a thickness of 5 &#x212b; to 100 &#x212b; is formed at the same temperature as employed for a p cladding layer. Next, the temperature is increased to the growth temperature contact layer in the subsequent process. Since the capping layer is formed, and the surface of the p cladding layer is not exposed during heating, excessive doping of Mg or mixture of impurities into the p cladding layer is suppressed. The deterioration of characteristics of the p cladding layer is prevented. Then, on the capping layer, a p contact layer is formed at a temperature of 950&#xb0; C. to 1100&#xb0; C.

Group III nitride semiconductor light-emitting device and production method therefor

To produce a Group III nitride-based compound semiconductor having a m-plane main surface and uniformly oriented crystal axes. A mesa having a side surface having an off-angle of 45&#xb0; or less from c-plane is formed in a a-plane main surface of a sapphire substrate. Subsequently, trimethylaluminum is supplied at 300&#xb0; C. to 420&#xb0; C., to thereby form an aluminum layer having a thickness of 40 &#x212b; or less. The aluminum layer is nitridated to form an aluminum nitride layer. Through the procedure, a Group III nitride-based compound semiconductor is epitaxially grown only from a side surface of the mesa having an off-angle of 45&#xb0; or less from c-plane in the sapphire substrate having an a-plane main surface. Thus, a Group III nitride-based compound semiconductor having m-plane which is parallel to the main surface of the sapphire substrate can be formed.

Method for producing group III nitride-based compound semiconductor, wafer including group III nitride-based compound semiconductor, and group III nitrided-based compound semiconductor device

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Shugo Nitta