Jsr Corporation

Japan Synthetic Rubber Co., Ltd.

Shoei Tsuji

Minoru Tanaka

Fumio Tsutsumi

Akihiko Morikawa

Toshiyuki Hayakawa

Keisuke Kuriyama

Yoji Mori

Takahiro Okamoto

Masayuki Motonari

Hideo Nakanishi

Hideki Nishimura

Kentarou Kanae

Atsushi Baba

Rikimaru Kuwabara

Takashi Kawata

Eiichirou Kunitani

Takafumi Shimizu

Toshihiro Nishimura

Hidekatsu Gotoh

Motoharu Higuchi

Junji Ayukawa

A chemical mechanical polishing aqueous dispersion includes: (A) an amino acid, (B) abrasive grains, (C) a surfactant, (D) an oxidizing agent, and (E) ammonia, the ratio (W/W) of the content (W) of the amino acid to the content (W) of the oxidizing agent being 1.5 to 6.0, and the ratio (W/W) of the content (W) of the ammonia to the content (W) of the oxidizing agent being 0.05 to 0.6.

Chemical mechanical polishing aqueous dispersion, chemical mechanical polishing method, and chemical mechanical polishing aqueous dispersion preparation kit

The present invention relates to polishing pads, including at least 60 to 99 parts by weight of a polymer matrix (A) having 1,2-polybutadiene; and 1 to 40 parts by weight of component (B) having a copolymer having a polyether block, where the total amount of the polishing pad is 100 parts by mass, polymer matrix (A) includes 1,2-polybutadiene in an amount of at least 60 parts by weight, relative to 100 parts by mass of the polishing pad, component (B) includes the copolymer having a polyether block in an amount of at most 40 parts by weight relative to 100 parts by mass of the polishing pad, and the polishing pads have a surface resistivity of 2.6&#xd7;10to 9.9&#xd7;10&#x3a9;.

Chemical mechanical polishing pad

A chemical mechanical polishing pad of the present invention has the following two groups of grooves on the polishing surface: (i) a group of first grooves intersect a single virtual straight line extending from the center toward the periphery of the polishing surface and have a land ratio represented by the following equation of 6 to 30: Land ratio=(P&#x2212;W)&#xf7;W (where P is the distance between adjacent intersections between the virtual straight line and the first grooves, and W is the width of the first grooves); and (ii) a group of second grooves extend from the center portion toward the peripheral portion of the polishing surface and consist of second grooves which are in contact with one another in the area of the center portion and second grooves which are not in contact with any other second grooves in the areas of the center portion. The chemical mechanical polishing pad of the present invention has a high polishing rate and excellent in-plane uniformity in the amount of polishing of the surface to be polished even when the amount of an aqueous dispersion for chemical mechanical polishing is made small.

Chemical mechanical polishing pad and chemical mechanical polishing method

An (meth)acryloyl group-modified ethylene-&agr;-olefin copolymer (A) which has (meth)acryloyl group as a the side-chain thereof, wherein the intrinsic viscosity &lsqb;&eegr;&rsqb; was 0.01 to 10 dl/g measured in decalin at a temperature of 135&deg; C.; and a rubber composition which comprises said (meth)acryloyl group-modified ethylene-&agr;-olefin copolymer, a vulcanizing agent, and/or a crosslinking agent; in addition, a liquid curable rubber composition which comprises, component (A), reactive diluent (D), and if necessary, photopolymerization initiator (E).

(Meth)acryloyl group-modified ethylene-alpha-olefin copolymer, production method thereof and rubber composition

An olefin thermoplastic elastomer containing an olefin random copolymer formed by copolymerizing ethylene, an &agr;-olefin having 3 to 10 carbon atoms and an unsaturated monomer having a functional group, and optionally a non-conjugated diene, and metal ions crosslinking the olefin random copolymer, has the same or similar rubber elasticity, flexibility and molding and processability as the conventional olefin thermoplastic elastomers, and has good mechanical properties, wear resistance, in particular scratch resistance.

Olefinic thermoplastic elastomer, process for production thereof, olefinic thermoplastic elastomer compositions, process for producing the same, and moldings thereof

The invention provides a flame-retardant rubber composition which may form a vulcanizate of an elastomer whose deterioration of mechanical strength is little to enjoy excellent mechanical properties, even when a nonhalogenated flame retardant is contained in a high proportion in the composition, and a flame-retardant elastomer obtained therefrom. The flame-retardant rubber composition contains (A) an olefin copolymer having a functional group, which comprises (a-1) a structural unit derived from ethylene, (a-2) a structural unit derived from an &agr;-olefin compound having 3 to 10 carbon atoms, (a-3) a structural unit derived from a functional group-containing unsaturated compound, and optionally (a-4) a structural unit derived from a nonconjugated diene compound, and has an intrinsic viscosity &lsqb;&eegr;&rsqb; of 0.1 to 10 dL/g as measured in decalin at 135&deg; C., (B) a vulcanizing agent and/or a crosslinking agent and (C) a nonhalogenated flame retardant. The flame-retardant elastomer is obtained by subjecting the flame-retardant rubber composition to a vulcanizing treatment.

Flame-retardant rubber composition and flame-retardant elastomer

An ethylene-.alpha.-olefin-non-conjugated diene copolymer rubber composition comprising a low molecular weight component copolymer composed of an ethylene-.alpha.-olefin-non-conjugated diene copolymer having a Mooney viscosity (ML.sub.1+4, 100.degree. C.) of 10 to 150, an .alpha.-olefin content of 30 to 60% by weight and an iodine value of 37 to 65, and a high molecular weight component copolymer composed of an ethylene-.alpha.-olefin-non-conjugated diene copolymer having a Mooney viscosity (ML.sub.1+4, 100.degree. C.) of 100 to 500, an .alpha.-olefin content of 15 to 50% by weight and an iodine value of 3 to 15, the ratio of the iodine value of the low molecular weight component copolymer to the iodine value of the high molecular weight component copolymer being at least 4/1. The above composition can inhibit a gel from being produced during processing and achieve a high degree of cross-linking and is excellent in compression set, shape-retention and sponge surface skin.

Ethylene-.alpha.-olefin-non-conjugated diene copolymer rubber composition

A rubber composition excellent in shape-retainability also in processibility, compression set and the like, which comprises a single ethylene-.alpha.-olefin-non-conjugated diene copolymer which has (1) a Mooney viscosity (ML.sub.1+4, 100.degree. C.) of 80 to 200, (2) a weight average molecular weight/number average molecular weight ratio of 6 or more as measured by a gel permeation chromatography (GPC), and (3) a stress-retention of 0.2 or more after 100 seconds at 80.degree. C. in a compression type stress-relaxation test.

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Tokyo, Japan

Shoei Tsuji