Shanghai Huali Microelectronics Corporation

Shanghai Huali Integrated Circuit Corporation

Shirui Yu

Lin Nan Li

Xuan Zhao

Jiaqi Liu

Yiqun Tan

The present invention provides an image processing method for CDSEM for determining a measuring range of an image of a target pattern measured by a CDSEM machine. The image processing method of CDSEM comprises: obtaining a first gray scale image based on the image of the target pattern; performing Fourier transform to the first gray scale image to obtain a first frequency spectrum distribution; filtering out frequency spectrum components whose absolute values of ordinate are greater than preset threshold in the first frequency spectrum distribution to obtain a second frequency spectrum distribution, the preset threshold relates to the background noise and the signal frequency of SRAF features; and determining the measuring range based on the second frequency spectrum distribution.

Image processing method and device for CDSEM

A hotspot correction method is provided. The layout patterns in the hotspot regions are accurately corrected by using an ILT method. Then the layout patterns in the extension regions are corrected by using an OPC method. As a result, the layout patterns in the hotspot regions can be accurately corrected while pattern distortion of the extension regions generated due to the regional ILT correction can be prevented. Moreover, high demanding of calculation capability and long calculation time of global ILT correction can be avoided.

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Shanghai, China

Shirui Yu