Mcelectronics Co., Ltd.

Hitachi Kokusai Electric Co., Ltd.

Shimao Yoneyama

Daniel L Flamm

Georgy K Vinogradov

Georgy Vinogradov

A process for fabricating a product 28, 119. The process comprises the steps of subjecting a substrate to a composition of entities, at least one of the entities emanating from a species generated by a gaseous discharge excited by a high frequency field in which the vector sum of currents to phase and inverse-phase capacitive coupled voltages from the inductive coupling structure can be selectively maintained.

Process depending on plasma discharges sustained by inductive coupling

A process for fabricating a product including the steps of subjecting a substrate to a composition of entities, at least one of the entities emanating from a species generated by a plasma excited by a high frequency field provided by an inductive coupling structure in which the phase and anti-phase capacitive currents into the plasma are substantially balanced.

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Yamanashi, Japan

Shimao Yoneyama