Tokyo Electron Limited

Hitachi Koki Co., Ltd.

Shigeru Moriyama

Nobuhiro Takano

Shigeru Shinohara

Toshio Mizoguchi

Yoshinori Ikeda

Kenrou Ishimaru

Shota Umezaki

Takashi Uno

Yoshiharu Ota

Ryo Yamamoto

Yuki Matsumura

Shigeki Tanaka

A substrate processing method according to an embodiment of the present disclosure includes a step of holding a substrate by a substrate holding unit () which is rotatable, a step of arranging a top plate portion () above the substrate, a step of supplying a processing liquid to the substrate, and a step of supplying a rinsing liquid (Lr) between the substrate and the top plate portion () to wash the substrate and the top plate portion () with the rinsing liquid (Lr).

Substrate processing method and substrate processing apparatus

A local exposure apparatus for performing exposure processing on a specific area of a photosensitive film formed on a substrate includes a substrate conveyor configured to define a substrate conveying path and to horizontally convey the substrate along the substrate conveying path, a chamber configured to define an exposure processing space, a light source including a plurality of light-emitting elements linearly arranged above the substrate conveying path, a light emission drive unit configured to selectively drive one or more of the light-emitting elements of the light source, a substrate detector configured to detect the substrate conveyed by the substrate conveyor, and a control unit configured to control the light emission drive unit such that, when the specific area of the photosensitive film moves below the light source, only the light-emitting elements capable of irradiating the given area are driven to emit the light.

Local exposure apparatus, local exposure method and storage medium

A battery charger is capable of accurately determining that a battery has reached a fully charged condition regardless of the kind of the batteries to be charged, the condition of the battery, battery temperature at the time when charging starts, charge current, and ambient temperature. A battery temperature is sampled at every predetermined timing, and a change in battery temperature rise gradient is computed each time the battery temperature is sampled. It is determined that the battery has reached the fully charged condition based on a transition changing from increment to decrement of the change in battery temperature rise gradient.

Battery charger and method of detecting a fully charged condition of a secondary battery

A charging circuit generates a charging current from an ac supply which is supplied to a secondary battery in a battery package through first terminals. A second terminal receives a temperature detection signal from a thermistor on the secondary battery. A value of the temperature detection signal is sampled every predetermined interval. A memory stores the sampled value. A difference between the sampled value and the value from the memory is obtained, as well as the temperature decrease value between the sampled value and the value stored, when it applies. An error signal is generated when the difference is higher than a predetermined value and the operator is alarmed and informed of the error. The difference may be obtained between the sampled value and the value one-cycle-previously-sampled value from the memory, between the sampled value and a minimum of the sampled values, or between the sampled value and a charging start value of the sampled value. The thermistor is supplied with a supply voltage through a switch and an error condition caused by leakage of the electrolyte from the battery is detected when the voltage at the second terminal is higher than the predetermined value, the charging current generation circuit is controlled to stop generating the charging current.

Battery charging apparatus with error detection

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Kumamoto, Japan

Shigeru Moriyama