Hitachi Kenki Fine Tech Co., Ltd.

Hitachi Construction Machinery Co., Ltd.

Shigeru Miwa

Takenori Hiroki

Hiroshi Kuroda

Takafumi Morimoto

Ken Murayama

Yukio Kenbou

Tooru Kurenuma

Yuuichi Kunitomo

Hiroaki Yanagimoto

Yoshiyuki Nagano

Shigenori Aoki

Hajime Mizunoya

Tadashi Fujieda

Kishio Hidaka

Mitsuo Hayashibara

Tohru Miyata

Yoshio Akutsu

Tooru Shinaki

Yoshiyuki Nag'No

Yasushi Minomoto

Seigo Kikuchi

A probe is made by attaching a carbon nanotubeto a mounting base end, which eliminates the effects of a carbon contamination film, to increase the bonding strength, increase the conductivity of the probe, and strengthen the bonding performance thereof by coating the entire circumference of the nanotube and the base with a coating film, rather than coating just one side. The work of mounting the carbon nanotube and mounting base end are performed under observation by a microscope. Further, the carbon contamination filmformed by an electron microscope is stripped off at a stage before bonding by the coating film.

Probe manufacturing method, probe, and scanning probe microscope

The probe tip movement control method of the scanning probe microscope is used for a scanning probe microscope provided with a cantileverhaving a probe tipfacing a sample. The atomic force occurring between the probe tip and sample is measured when the probe tip scans the surface of the sample. X-, Y-, and Z-fine movement mechanisms, andare used to relatively change the positions of the probe tip and sample. It is possible to maintain a high measurement accuracy and enable scan movement of a probe tip on a sample surface by simple control when measuring a part having a gradient in measurement of an uneven shape on a sample surface.

Scanning type probe microscope and probe moving control method therefor

A scanning probe microscope has a cantilever with a probe facing a sample and a measurement section for measuring a physical quantity occurring between the probe and the sample when the probe scans a surface of the sample, holding the physical quantity constant to measure the surface of the sample. The above microscope further has a probe tilt mechanism, an optical microscope etc. for detecting a position of the probe when the probe is tilted, and a control section for setting the probe in a first tilt posture and second tilt posture, measuring a surface of the sample by the measurement section at each tilt posture, detecting the position of the probe at least at the second tilt posture by the optical microscope etc., and making a measurement location at the second tilt posture match with a measurement location at the first tilt posture for measurement.

Scanning probe microscope and measurement method using the same

This portable ultrasonic detector has a moved distance instrument comprised of an encoder for detecting a moved amount and a counter for counting the moved amount signal outputted from the encoder, as a means for obtaining position information of an ultrasonic probe. When moving the ultrasonic probe on the surface of the object on the occasion of the inspection, the moved distance instrument measures the moved amount of the ultrasonic probe. The measured moved amount of the ultrasonic probe is sent to an arithmetic processing section of the device body. Also, the ultrasonic detector detects A-scope data when scanning the inspected object with the ultrasonic probe, and executes the predetermined processing by using the data. The ultrasonic detector combines the A-scope data and the moved distance data of the ultrasonic probe to make an inner scope image (B-scope image, etc). When repeatedly scanning the same spot of the object with the ultrasonic probe in order to make the B-scope image, etc. and display them on a display section, peaks of defect echo waves are memorized in piles, and further two defect images or more are displayed on the B-scope image. This ultrasonic detector is configured to draw a storage-type B-scope images. Thereby, defect images can be evaluated in detail and a defect position can be detected accurately.

Portable ultrasonic detector

A non-destructive inspection device has an inspection unit body and a support casing which is used as a set-up type device by combining the inspection unit body and the support casing in ordinary inspection, and is used as a portable type device by separating them for special inspection situations involving narrow places or high places. The support casing can be freely combined to or separated from the inspection unit body. When combining the two components, the non-destructive inspection device can carry out the inspection based on a stable set-up mode in the same way as conventional devices. When separated, the inspection unit body is used as a portable device.

Portable non-destructive inspection device and support casing therefor

Growing community of inventors

Tsuchiura, Japan

Shigeru Miwa