Yamatake Corporation

Shigeru Aoshima

Hiroyuki Inagaki

Takeshi Watanabe

Yasuharu Ooishi

Junichi Matsuda

Hiroshi Hatakeyama

Isamu Warashina

Junichi Isetani

Nobuyoshi Shingyouji

Yasue Hayashi

Shuji Morio

A heat radiation coefficient C [=Ph/(Th&#x2212;To)] from a microheater is calculated in accordance with a power Ph applied to the microheater which is supported in air and provided in an ambient gas, a heater temperature Th, and an ambient temperature To at this moment. Further, a thermal conductivity &#x3bb;of the ambient gas is obtained from the calculated heat radiation coefficient C based on a proportional relation [C=K&#xb7;&#x3bb;] between a thermal conductivity &#x3bb;of the ambient gas and the heat radiation coefficient C at a measurement temperature T [=(Th&#x2212;To)/2].

Thermal conductivity measuring method and apparatus, and gas component ratio measuring apparatus

To provide a flow meter, and a flow volume controlling device equipped therewith, capable of reducing pressure loss while obtaining a flow rectifying effect in a measurement fluid. A flow meter for measuring the flow volume of a measurement fluid, equipped with a flow path wherein the measuring fluid flows, and a flow rectifier that is disposed within the flow path, where the flow rectifier has holes for rectifying the flow of a measurement fluid, and has an area that is wider than the flow path cross-sectional area in a direction that is perpendicular to the direction in which the flow path extends. The flow volume controlling device is provided with the flow meter, a controlling valve, and controlling means for adjusting the flow volume of a fluid that flows through the flow path of the flow meter through controlling the controlling valves based on information regarding the flow volume detected by the flow meter.

Flow meter and flow volume controlling device

To provide a highly accurate flow meter. A Flow meter comprising an inflow opening into which a measurement fluid flows, an outflow opening from which a measurement fluid flows, and a flow path connecting the inflow opening and the outflow opening, wherein the flow path is bent at a first bend portion, wherein: a first porous plate is disposed in the first bend portion of the flow path at an angle relative to the direction in which the flow path extends before and after the first bend portion, and a flow sensor for detecting the flow speed or flow volume of a measurement fluid that flows in the flow path, disposed on the inner wall of the flow path on the outflow opening side of the first bend portion.

Flow meter and flow controlling device

An air suction passage (A,B) is provided with a pick and place confirming sensor () comprising a gas flow sensor. The pick and place confirming sensor () measures the flow rate of air sucked in from an air suction port () of a pick and place nozzle (). The presence or absence of a part lifted to the pick and place nozzle () is detected on the basis of the measurement result.

Negative pressure attraction device and attraction confirming sensor

A waste-material entry prevention member arranged upstream of a flow sensor is a rod- or plate-like member protruding halfway across the cross-section of a flow passage. Hence, vortexes or energy of the vortexes produced in fluid flowing by the waste-material entry prevention member is diffused by a stream of the fluid passing through a space left between the waste-material entry prevention member and the wall surface of the flow passage which the waste-material entry prevention member faces. Thus, production of vortexes is held down. Further, by making the flow sensor generate heat or heating the flow sensor, thermophoresis of the fluid is caused near the surface of the flow sensor. By this, particles contained in the fluid are prevented from accumulating on the flow sensor.

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Tokyo, Japan

Shigeru Aoshima