Fujitsu Semiconductor Limited

Fujitsu Corporation

Fujitsu Microelectronics Limited

Shigeo Satoh

Akihiro Usujima

Kaina Suzuki

Shinichi Kawai

Sadahiro Kishii

Masanori Terahara

Toshio Nomura

Takae Sukegawa

Taketo Watanabe

Takayuki Kawamata

Hirofumi Watatani

Ryo Tanabe

Masaki Okuno

Hiroshi Morioka

Masataka Kase

A semiconductor device includes a first transistor including a first source/drain region and a first sidewall spacer, and a second transistor including a second source/drain region and a second sidewall spacer, the first sidewall spacer has a first width and the second sidewall spacer has a second width wider than the first width, and the first source/drain region has a first area and the second source/drain region has a second area larger than the first area.

Semiconductor device and method of manufacturing same

A semiconductor device including a silicon substrate including a first region and a second region; a gate electrode above the first region and the second region; an insulation film extending from the gate electrode to the second region to cover part of the gate electrode and part of the second region; a source region and a drain region formed in the silicon substrate, silicide formed on the source region, on the drain region, and on the gate electrode; an interlayer insulation film formed above the gate electrode and the insulation film; a first electrically conductive via formed in the interlayer insulation film, a second electrically conductive via formed in the interlayer insulation, and a third electrically conductive via formed in the interlayer insulation and electrically connecting to the gate electrode; and at least one electrically conductive member formed on the insulation film in the interlayer insulation film.

Semiconductor device

A first insulating film is formed above a semiconductor substrate with a device isolation insulating film defining a device region, a gate electrode and source/drain region formed. The first insulating film is etched, leaving the first insulating film in a recess formed in an edge of the device isolation insulating film. A second insulating film applying a stress to the semiconductor substrate is formed after etching the first insulating film.

Semiconductor device having stressor film and method of manufacturing semiconductor device

A disclosed MOS transistor has a drain region offset from a gate electrode structure, wherein the gate electrode structure includes at least a first gate electrode and a second gate electrode such that the second gate electrode is located at the drain side of the first gate electrode and the second gate electrode is isolated from the first gate electrode by an insulation film, and wherein the first and second gate electrodes are formed respectively on a first gate insulation film and a second gate insulation film having an increased thickness as compared with the first gate insulation film.

LDMOS transistor having a gate electrode formed over thick and thin portions of a gate insulation film

A semiconductor device production method includes: forming in a silicon substrate first and second region of first and second conductivity type in contact with each other; forming a gate electrode above the first and the second region; forming an insulation film covering part of the gate electrode and part of the second region; forming a source region and a drain region of the second conductivity type; forming interlayer insulation film covering the gate electrode and the insulation film; and forming in the interlayer insulation film first, second and third contact hole reaching the source region, the drain region, and the gate electrode, respectively, and at least one additional hole reaching the insulation film, and forming a conductive film in the first, the second, and the third contact hole and the additional hole to form first, second and third electrically conductive via and electrically conductive member.

Semiconductor device production method

A method of manufacturing a semiconductor device includes forming a first and a second isolation insulating film to define a first, a second, a third and a fourth region, forming a first insulating film, implanting a first impurity of a first conductivity type through the first insulating film into the first, the second and the fourth region at a first depth, forming a second insulating film thinner than the first insulating film, implanting a second impurity of a second conductivity type through the second insulating film into the third region at a second depth in the semiconductor substrate, implanting a third impurity of the second conductivity type into the third region at a third depth shallower than the second depth, forming a first transistor of the first conductivity type in the third region, and forming a second transistor of the second conductivity type in the fourth region.

Semiconductor device and method of manufacturing the same

A semiconductor device includes: a semiconductor substrate having a p-MOS region; an element isolation region formed in a surface portion of the semiconductor substrate and defining p-MOS active regions in the p-MOS region; a p-MOS gate electrode structure formed above the semiconductor substrate, traversing the p-MOS active region and defining a p-MOS channel region under the p-MOS gate electrode structure; a compressive stress film selectively formed above the p-MOS active region and covering the p-MOS gate electrode structure; and a stress released region selectively formed above the element isolation region in the p-MOS region and releasing stress in the compressive stress film, wherein a compressive stress along the gate length direction and a tensile stress along the gate width direction are exerted on the p-MOS channel region. The performance of the semiconductor device can be improved by controlling the stress separately for the active region and element isolation region.

Semiconductor device with strain

A trench is formed in a surface layer of a semiconductor substrate, the trench surrounding an active region. A lower insulating film made of insulating material is deposited over the semiconductor device, the lower insulating film filling a lower region of the trench and leaving an empty space in an upper region. An upper insulating film made of insulating material having therein a tensile stress is deposited on the lower insulating film, the upper insulating film filling the empty space left in the upper space. The upper insulating film and the lower insulating film deposited over the semiconductor substrate other than in the trench are removed.

Method of manufacturing semiconductor device having device characteristics improved by straining surface of active region

A semiconductor device is provided with a first conductivity type semiconductor substrate (); a voltage supplying terminal () arranged on the semiconductors substrate (); one or more elements () which include a second conductivity type well section () and are arranged on the semiconductor substrate (); a second conductivity type first conductive layer (), which is a lower layer of the one or more elements (), is in contact with the second conductivity type well section (), and connects the second conductivity type well section () of the one or more elements () with the voltage supplying terminal (); and a first conductivity type second conductive layer () formed in contact with a lower side of the first conductive layer ().

Semiconductor device, semiconductor system and semiconductor device manufacturing method

A trench is formed in the surface layer of a semiconductor substrate, surrounding an active region. A lower insulating film made of insulating material fills a lower region of the trench. An upper insulating film fills a region of the trench above the lower insulating film. The upper insulating film has therein a stress generating tensile strain in a surface layer of the active region.

Growing community of inventors

Kawasaki, Japan

Shigeo Satoh