Mitsubishi Denki Kabushiki Kaisha

Shigeo Nagao

Masazumi Matsuura

Atsuhiro Fujii

Hideki Genjo

Hideo Kotani

Hiroji Ozaki

The method of forming an interlayer insulating film insulating first and second layers of conductor patterns in a semiconductor device includes the steps of preparing a reaction gas including at least ozone and silicon alkoxide, wherein the ratio of ozone with respect to silicon alkoxide is adjusted to be not less than 5 within the reaction gas, and forming an insulating film by CVD reacting the reaction gas at atmospheric pressure at the temperature of 350.degree. C.- 450.degree. C., whereupon the interlayer insulating film includes at least the insulating film formed by atmospheric pressure CVD reaction.

Method of manufacturing semiconductor device including interlaying

A method of forming a isolation region in a semiconductor device includes the steps of forming an underlying oxide film on a semiconductor substrate, forming a first polysilicon layer on the underlying oxide film, forming a silicon nitride film on the first polysilicon layer, patterning the silicon nitride film such that the silicon nitride film is left only on a circuit element region of the substrate at which a circuit element is to be formed, depositing selectively a second polysilicon layer by vapor deposition on regions of the first polysilicon layer which are exposed by patterning, and forming isolation regions of silicon oxide by thermally oxidizing at least the second and the first polysilicon layers using the patterned nitride film as a mask.

Method of forming isolation region in semiconductor device

The method of forming an interlayer insulating film insulating first and second layers of conductor patterns in a semiconductor device includes the steps of preparing a reaction gas including at least ozone and silicon alkoxide, wherein the ratio of ozone with respect to silicon alkoxide is adjusted to be not less than 5 within the reaction gas, and forming an insulating film by CVD reacting the reaction gas at atmospheric pressure at the temperature of 350.degree. C.-450.degree. C., whereupon the interlayer insulating film includes at least the insulating film formed by atmospheric pressure CVD reaction.

Semiconductor device including interlayer insulating film

An improved method for manufacturing P type semiconductor device such as used for memories is disclosed. Channeling such as caused by an ion implantation process is prevented by adopting a diffusion method to diffuse boron (7) from a boron glass formed on a layer of polysilicon or silicon oxide on a semiconductor substrate. This method provides a semiconductor device with shallow P type impurity diffusion regions.

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Hyogo, Japan

Shigeo Nagao