Chroma Ate Inc.

Shen-Hao Tsai

Wei-Chih Chen

Chin-Yuan Chang

Chun-Hao Hu

Yi-Yen Lin

Yu-Jui Liu

A wafer inspection system includes a carrier device, a probe card, a first metal kit and a surround separating unit. The probe card includes a detection portion and a conductive layer surrounding the detection portion and disposed on its bottom surface. The first metal kit is configured at a bottom portion of the probe card and coupled to the conductive layer and includes a first window for the detection portion to extend out and a first ring piece extending from a periphery of the first window. The surround separating unit includes a conductive wraparound body surrounding and laterally enclosing the detection portion and a wafer to be inspected during probing. The probe card, first metal kit, carrier device, and conductive wraparound body jointly define an space range, shielding the detection portion and wafer from external noise or interference sources, thereby improving inspection accuracy.

Wafer inspection system

The present invention provides a surge protection module which comprises a carrier board and a probe set. The carrier board is used to carry an electronic component. The probe set is disposed on the carrier board and has a plurality of probes and a short-circuit unit. Each probe is used for contacting the electronic component, and the short-circuit unit is selectively moved to a first position or a second position. When the short-circuit unit is moved to the first position, the short-circuit unit simultaneously contacts and shorts the plurality of probes. When the short-circuit unit is moved to the second position, the short-circuit unit is away from at least one of the plurality of probes.

Growing community of inventors

Taoyuan, Taiwan

Shen-Hao Tsai