Tescan Brno, S.r.o.

Orsay Physics

Sharang

Gregory Goupil

Jan Brulik

A method performs a planar and cross-sectional etching of semiconductor devices made up of multiple layers of dissimilar materials, like metals and dielectrics. The method results in the removal of multiple layers with the aim of either exposing a single layer of interest or cross-sectioning several layers to perform various applications including but not limited to, nanoprobing, circuit edit and failure analysis. The method comprises directing an ion beam toward a defined area on the semiconductor device in the presence of an etching agent, thereby removing at least a portion of the mixed metal and dielectric layer and producing a recess with at least one substantially smooth and planar surface in the milled area. The used etching agent comprises oxidizing and reducing elements in a ratio optimized such that the quantity of oxidizing elements is one element more than the quantity of reducing elements.

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