Globalfoundries Singapore Pte. Ltd.

Shao Ning Yuan

Juan Boon Tan

Soh Yun Siah

Yeow Kheng Lim

Shunqiang Gong

Back-side MOM/MIM structures are integrated on a device with front-side circuitry. Embodiments include forming a substrate having a front side and a back side that is opposite the front side, the substrate including circuitry on the front side of the substrate; and forming a metal-oxide-metal (MOM) capacitor, a metal-insulator-metal (MIM) capacitor, or a combination thereof on the back side of the substrate. Other embodiments include forming a through-silicon via (TSV), in the substrate, connecting the MOM capacitor, the MIM capacitor, or a combination thereof to the circuitry on the front side of the substrate.

Growing community of inventors

Singapore, Singapore

Shao Ning Yuan