Applied Materials, Inc.

Shainish Nellikka

Danny D Wang

Zhiyuan Ye

Kartik Bhupendra Shah

Abhishek Dube

Shu-Kwan Danny Lau

Ala Moradian

Brian Hayes Burrows

Richard Omar Collins

Toshiyuki Nakagawa

Enle Choo

Abraham Palaty

Raja Murali Dhamodharan

Vinodh Ramachandran

A heating module for a substrate processing chamber includes heating lamps coupled to a reflector plate and a heat exchanger. The heat exchanger cools a gas within the heating module. A fan within the heating module circulates the gas through apertures in the reflector plate to cool the heating bulbs. The gas is cooled by the heat exchanger, and is recirculated. One or more shrouds directs the gas as the gas is being circulated.

Air shrouds with integrated heat exchanger

A process chamber includes a chamber body having a ceiling disposed above a floor with a chassis and an injector ring disposed therebetween. Upper and lower clamp rings secure the upper and floors, respectively, in place. An upper heating module is coupled to the upper clamp ring above the ceiling. A lower heating module is coupled to the lower clamp ring below the floor.

Epitaxial deposition chamber

Growing community of inventors

Bengaluru, India

Shainish Nellikka