Vanguard International Semiconductor Corporation

Winbond Electronics Corporation

Windbond Electronics Corp.

Sen-Huan Huang

Hsi-Chuan Chen

Yeur-Luen Tu

Bor-Ru Sheu

Haochieh Liu

Liang-Gi Yao

Erik S Jeng

Jung-Ho Chang

Wan-Yih Lien

Meng-Jaw Cherng

Li-Ming Wang

Wen-Kuei Hsieh

Kwong-Jr Tsai

Hong-Hsiang Tsai

Li Yeat Chen

Jin-Dong Chern

Arthur Chin

A method of manufacturing DRAM capacitor. An active region is formed above a substrate. A plurality of parallel word lines is formed above the substrate. A first plug and a second plug are formed between the word lines in locations for forming the desired bit line contact and node contact, respectively. Insulation material is deposited into the remaining space between the word lines. A bit line contact is formed above the first plug. A plurality of parallel bit lines is formed above the substrate. The bit lines are perpendicular to the word lines. The bit line is electrically connected to the substrate through the bit line contact and the first plug. The bit lines are electrically insulated from each other. Furthermore, each bit line is covered on top by a hard material layer. Finally, a node contact is formed over the second plug.

Method of manufacturing DRAM capacitor

A fabrication method for a self-aligned contact opening involves using polysilicon to protect a cap layer above a conductive line or even a corner of a spacer on a sidewall of the conductive line. A silicon oxide layer is then etched using a conventional silicon oxide etching recipe to form a self-aligned contact opening. This conventional silicon oxide etching recipe not only has a higher etching selectivity for silicon oxide to silicon nitride, but also yields a higher etching selectivity ratio for silicon oxide to polysilicon.

Method of fabricating a self-aligned contact opening

A method of fabricating a semiconductor device having a landing plug is provided. First, a substrate is provided, which has active areas, wordlines stretching over the active areas and an isolation layer filling the gaps between the wordlines. Second, a pattern is defined and the isolation layer masked with the pattern is etched for the formation of bitline and node contacts, wherein the pattern has a protrusion which shortens the length of the bitline to wordline overlap formed thereby. Finally, the contacts are filled with a conducting layer.

Lading plug contact pattern for DRAM application

A process for creating a capacitor structure, for a DRAM device, in which the capacitance has been increased via use of a high dielectric constant capacitor dielectric layer, and via the use of a storage node electrode, comprised of a top surface HSG layer, has been developed. The process features deposition of an HSG TiN layer, used as part of a storage node structure, resulting in an increase in storage node electrode surface area, and thus an increase in capacitance.

Method for forming a high surface area capacitor electrode for DRAM

A method for creating a metal filled, high aspect ratio, contact opening, in thick insulator layers, allowing contact between a metal interconnect structure and a region of a semiconductor substrate, has been developed. The process features creating a stacked contact hole opening, comprised of a upper contact hole opening, of a specific diameter size, overlying a lower contact hole opening, having an opening larger in diameter than the opening used for the upper contact hole opening. The lower contact hole opening is created via an anisotropic RIE procedure, followed by a wet etch procedure, used to enlarge the diameter of the lower contact hole opening. The upper contact hole opening, created using an anisotropic RIE procedure, is formed using the original diameter opening, used previously for the pre-wet etched, lower contact hole opening, and is easily aligned to a metal filled, enlarged lower contact hole opening.

Method for fabricating a high aspect ratio stacked contact hole

DRAM cells having zigzag-shaped stacked capacitors with hemispherical gain (HSG) surfaces to increase capacitance is achieved. FET gate electrodes are formed having a planar first insulating layer thereon. Contact openings are etched for bit line contacts and capacitor node contacts. A first polysilicon layer having a top silicide layer is patterned to form bit lines and node contacts. A planar second insulating layer is formed with openings to the node contacts, which are filled with a second polysilicon to form electrical connections. A etch-stop layer is deposited followed by a multilayer composed of alternating layers of phosphosilicate and borosilicate glass. Recesses are etched in the multilayer to the node contacts, and the sidewalls in the recesses are isotropically etched to form a zigzag profile. A doped amorphous silicon layer is deposited and treated to form a HSG layer. An insulating layer is formed in the recesses to provide an etch mask and the HSG layer is etched back. The multilayer and the insulating layer are removed to provide zigzag-shaped/HSG capacitor bottom electrodes. An interelectrode dielectric layer is deposited, and a patterned fourth polysilicon layer is used to form the top electrodes to complete the array of capacitors.

Method for making dynamic random access memory (DRAM) cells having

A method for forming for use within an integrated circuit a narrow aperture width patterned positive photoresist layer from a blanket positive photoresist layer. There is first formed over a semiconductor substrate a reflective layer. There is then formed upon the reflective layer a blanket positive photoresist layer. There is then photoexposed through a reticle the blanket positive photoresist layer to form a photoexposed blanket positive photoresist layer. Finally, the photoexposed blanket positive photoresist layer is developed to form a narrow aperture width patterned positive photoresist layer. The narrow aperture width patterned positive photoresist layer may then be employed as a narrow aperture width patterned positive photoresist etch mask layer in patterning a narrow aperture width patterned reflective layer from the reflective layer. In addition, at least the narrow aperture width patterned reflective layer may then be employed in forming an aperture at least partially through a substrate layer formed beneath the reflective layer. Typically, the aperture will be a contact or interconnection via completely through an insulator layer formed beneath the reflective layer. The method reduces the photoexposure energy and compensates for depth of focus limitations in forming the narrow aperture width patterned positive photoresist layer from the blanket positive photoresist layer.

Enhanced reflectivity coating (ERC) for narrow aperture width contact

A metal layer (24) is formed on an isolation layer (22) to act as interconnections. Subsequently, a thin liner layer (26) is optionally formed along the surface of the metal layer (24) to serve as a buffer layer. An undoped silicate glass (USG) layer (28) is deposited on the liner layer (26). The USG layer (28) is formed using ozone and tetraethylorthosilicate (TEOS) as a source at a temperature of approximately 380 to 420.degree. C. Oxygen gas is used as a carrier for the ozone. The flow rate of the oxygen gas is approximately 4000 to 6000 sccm. Helium gas is used as a carrier for the TEOS. The flow rate of the helium is approximately 3000 to 5000 sccm. A silicon nitride layer (30) is deposited on the USG layer (28) using plasma enhanced chemical vapor deposition (PECVD). The silicon nitride layer (30) serves as a main passivation layer. The thickness of the silicon nitride layer (30) is approximately 3000 to 7000 angstroms.

Growing community of inventors

Tainan, Taiwan

Sen-Huan Huang