Riken Corporation

Furukawa Co., Ltd.

Seigo Ohno

Hiromasa Ito

Akihide Hamano

Hiroaki Minamide

A mobility measuring apparatus includes a storage unit that respectively stores a relationship between the mobility &#x3bc; of carriers in a semiconductor and a decay constant &#x3b3; of the carriers and a relationship between a reflectivity R of the semiconductor to a terahertz light and the decay constant &#x3b3; of the carriers, a light radiating unit that radiates a terahertz light to the semiconductor as a sample, a detecting unit that detects a reflected light of the sample to the radiated terahertz light, a reflectivity calculating unit that calculates the reflectivity Rof the sample by determining a ratio of an intensity of the reflected light relative to an intensity of the radiated terahertz light, an obtaining unit that obtains the decay constant &#x3b3;of the sample corresponding to the reflectivity Rof the sample by making reference to the stored relationship between the reflectivity R and the decay constant &#x3b3; of the carriers, and a mobility calculating unit that calculates the mobility &#x3bc;of the sample from the stored relationship between the mobility &#x3bc; and the decay constant &#x3b3; on the basis of the obtained decay constant &#x3b3;.

Mobility measuring apparatus, method therefor, and resistivity measuring apparatus and method therefor

A nondestructive carrier concentration measuring device () includes: a storage unit () that stores a correlation between the reflectance of an inorganic compound semiconductor against terahertz light and a carrier concentration; a light radiation unit () that irradiates the terahertz light () to the inorganic compound semiconductor as a sample; a detection unit () that detects reflected light () of the inorganic compound semiconductor against the irradiated terahertz light (); a reflectance calculation unit () that compares the irradiated terahertz light () with the reflected light () and calculates an actual measurement value of the reflectance of the inorganic compound semiconductor; and a read unit () that refers to the stored correlation and reads the carrier concentration of the sample corresponding to the actual measurement value of the reflectance.

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Wako, Japan

Seigo Ohno