Average Co-Inventor Count = 6.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Hitachi Plant Technologies, Ltd. (2 from 136 patents)
2 patents:
1. 7905979 - Method for holding substrate in vacuum
2. 7326457 - Substrate holding device including adhesive face with hexagons defined by convex portions