Hitachi, Ltd.

Hitachi Software Engineering Company, Ltd.

Satoshi Ito

Hidefumi Masuzaki

Kazue Takahashi

Saburo Kanai

Ryoji Hamasaki

Hiromichi Fujisawa

Masaaki Fujinawa

Hiroshi Kanazawa

Tamon Masimo

Kouichi Okamura

Tatsuya Murakami

Yasuo Kurosu

Eiichi Hadano

Tatehito Usui

Tsugio Takahashi

Tetsuo Ono

Tetsunori Kaji

Nobuyuki Minowa

Ken Naono

Kazutami Tago

Sigeo Ihara

Shirun Ho

Toshihiro Hananoi

Akihisa Hirasawa

Tatsuya Sakamoto

Kazunori Kinoshita

Miyuki Saji

Katsuhiko Fukui

Yusaku Yamamoto

Kenji Machida

A plasma processing apparatus having a plasma generating unit, a process chamber including an outer cylinder for withstanding a reduced pressure, and an inner cylinder made of non-magnetic material and being replaceable, arranged inside the outer cylinder, a process gas supply unit for supplying gas to the process chamber, a specimen table for holding a specimen and a vacuum pumping unit. A temperature monitoring unit monitors temperature of the inner cylinder, and a controller controls temperature of the outer cylinder. A desired inner cylinder temperature which is inputted in advance in response to a processing condition of the specimen is compared with the monitored temperature of the inner cylinder, and the controller controls the temperature of the outer cylinder in response to a result of the comparison so as to control the inner cylinder temperature to a predetermined value.

Plasma processing apparatus

A plasma processing method utilizing a plasma processing apparatus having a plasma generating unit, a process chamber including an outer cylinder for withstanding a reduced pressure, and an inner cylinder made of non-magnetic material and being replaceable arranged inside the outer cylinder, a process gas supply unit for supplying gas to the process chamber, a specimen table for holding a specimen and a vacuum pumping unit. A temperature of the inner cylinder is monitored, and a desired inner cylinder temperature which is inputted in advance in response to a processing condition of the specimen is compared with the monitored temperature of the inner cylinder. A temperature of the outer cylinder is controlled in response to a result of the comparison so as to control the inner cylinder temperature to a predetermined value.

Plasma processing method

Method of acquiring solution of an optimization problem, whereby information of problem and its solution is not delivered to solving system when requesting solving system to solve, and it is also made unnecessary to send ciphering key. Problem and ciphering key are input to client. Client generates nonsingular matrix P and permutation matrix Q by using ciphering key in conversion matrix generation routine, enciphers problem by using matrices P and Q in problem conversion routine, outputs enciphered problem from problem conversion routine to problem output interface, and sends enciphered problem from output interface to server via network. Server receives enciphered problem, finds solution in solving routine, outputs solution to solution output interface, and sends solution from solution output interface to client via network. Client receives solution in solution input interface, deciphers solution by using matrices P and Q in reverse conversion routine, and thereby obtains solution of original problem.

Method for obtaining a solution of an optimization problem

Values of input parameters are set. Simulations are executed in parallel for individual sets of input parameters by a plurality of processors to obtain design values which are execution results. The obtained design values are compared with the design condition. Directory files are constructed for plural kinds of input parameters corresponding to design values satisfying the design condition. Accumulative distribution in the distribution of parameter input values are determined in respect of the individual kinds of input parameters. Input values of parameters to be referred are extracted on the basis of values of the accumulative distribution every kind of input parameter. The kind of input parameter, the extracted input values and the number of the extracted input values are displayed through an input interface every kind of input parameter.

Method to support the setup of input parameters

Plasma processing apparatus and plasma processing method in which a part

A plasma processing apparatus is provided. In the apparatus, an inside surface of a process chamber is prevented from having its quality varied or becoming a heavy metal contamination source by plasma in the chamber, and at the same time the plasma characteristic is stabilized over time. In a plasma processing apparatus including a plasma generating unit, a process chamber capable of having its inside pressure reduced, a gas supply system for supplying a gas to the process chamber, a sample table for holding a sample and a vacuum pumping system, the process chamber has an outer cylinder capable of withstanding depressurization and an inner cylinder arranged inside the outer cylinder and being spaced therefrom through a gap, and a heater and a temperature control are provided in the outer cylinder. A non-magnetic metallic material not containing heavy metals, or ceramic, carbon, silicon or quartz is used for the inner cylinder. The temperature of the inner cylinder is controlled to a desired value by heating the outer cylinder using the heater and the temperature control. By controlling the temperature of the inner cylinder to, for example, 100.degree. C. to 350.degree. C., the surface temperature of the inner cylinder can be maintained at a desired value.

Plasma processing apparatus and plasma processing method

A method for transferring data between electronic filing systems via a communications network and using facsimile communications protocol is disclosed. The method includes the step of adding codes corresponding to non-standardized terminal capability information into a session start command (CSS) of a facsimile communication protocol and sending the CSS to a receiving end electronic filing system. The non-standardized terminal capability information includes a code indicating that the sending system is an electronic filing system and the memory capacity of the sending system, etc. The method further includes the step of adding header information at the top of the communication data to be transmitted. The header information includes an identifier identifying whether or not the data to be transmitted corresponds to an image; if it corresponds to an image, the header information further includes the size and line density of the image, the compression method for the image, etc. In the receiving end electronic filing system, the header information is decoded and the receiving end electronic filing system is controlled to properly reconstruct the received information in accordance with the decoded header information. This method makes it possible to transmit specific images such as large size images or color image and code information, which otherwise cannot be transferred with facsimile communications protocol.

Method for transferring data between electronic filing systems using

A partial region of an image is set as being a secret region and an ID code is put to data concerning this secret region, the data then being stored in a memory, so that, unless an ID code which is input from a keyboard is coincident with the stored ID code, the image is selectively prevented from being displayed on a CRT display, printed by a printer, or subjected to additional writing, revision, cutting on the display screen. Thus, it is possible to restrict the visual output or revision of secret portions of images and therefore possible to individually control images which need to be kept secret and those which need not.

Image filing system for protecting partial regions of image data of a

Image filing apparatus and method for thereby encoding and storing

An information processing system comprises a display apparatus having a display screen which can be held in position of either vertical elongation or lateral elongation. The information processing system provides the operator with messages necessary for operation. By detecting the position of elongation of the display screen, data for the messages are selectively rotated so as to be always displayed uprightly on the display screen.

Display apparatus with rotatable display screen

When image information of documents is stored in the image storage of an image filing device, the title information is entered for each document for easy retrieval of the image information after filing. For entry of the title information for each document into the image filing device, it is necessary to fill in title information in the title entry format, supply the title information entry format through the image input unit of the image filing device and to recognize the characters of the title information. This title information entry format is automatically designed and entered into the image storage by the operator who supplies the title information and file name by operating the keyboard of the image filing device. When the operator designates one of the plural title information entry formats entered for each file, the title information entry format thus designated is printed out by the image output unit of the image filing device. The printed title information entry format is filled-in with the title information and set in the image input unit of the image filing device along with a document to be filed. With the above operations, the image filing device recognizes the title information and files it along with the document into the image storage.

Method for generating title information entry format and method for

Original image information is stored electronically in a storage memory device. The original image information is transferred to a first buffer memory when the image information is to be edited. The editing image information is input through a keyboard and character generator, for example, and stored in a second buffer memory. Thus, the original and editing information are stored separately from each other. An image display control device reads out and combines the original and editing image information from the first and second buffer memories, respectively, to provide combined or resultant image information. A display device receives the resultant image information and displays the original and editing information differently so that the editing image information can be distinguished from the original image information on the display device.

Electronic image information filing apparatus displaying editing

A color document image processing apparatus comprising an image input means for inputting document image data including multivalue color image, a binarizing means for binarizing input document image data by a simple binarization or artificial binary-halftone process, an image memory means for temporarily storing image data binarized by said binarizing means, a codec means for executing predetermined coding for storing image data stored in the image memory means and executing decoding to the stored document image data, an image storing means for storing document image data encoded by the codec means, a binary-halftone transducing means for transducing binary image data decoded by the codec means into multivalue image data, and an image output means for outputting multivalue image data transduced by the binary-halftone transducing means.

Image processing system and apparatus for processing color documents

The present invention relates to an image information display system capable of displaying a specific unit image information piece with a method which is different from that of other image information pieces, in an electronic filing system for consecutively displaying a plurality of unit image information pieces at predetermined time intervals. An image information display system according to the present invention comprises a memory device having a region for storing image information pieces and a region for storing information pieces directing the display states for respective unit image information pieces, a display device for consecutively displaying unit image information pieces at predetermined time intervals, a device for successively reading out unit image information pieces from the memory device, and a control device for controlling the display device so that the unit image information piece thus read out may assume a display state on the basis of the information piece directing the display state.

Growing community of inventors

Odawara, Japan

Satoshi Ito