Samsung Electronics Co., Ltd.

Sangho Roh

Dohyung Kim

Sejun Park

Jaihyung Won

Gyuwan Choi

Eunsol Shin

Seung Moo Lee

A method of forming a hard mask layer on a substrate includes forming an amorphous carbon layer using nitrous oxide (NO). A source of carbon and the nitrous oxide (NO) are introduced to the substrate under a plasma ambient of an inert gas. The amorphous carbon layer has a nitrogen content ranging from about 0.05 at % to about 30 at % and an oxygen content ranging from about 0.05 at % to about 10 at %. In forming a semiconductor device, the hard mask layer is patterned, and a target layer beneath the hard mask layer is etched using the patterned hard mask layer as an etch mask.

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Seoul, South Korea

Sangho Roh