Lsi Logic Corporation

Sang-Yun Lee

Masaichi Eda

Hiroaki Takikawa

Yongbae Kim

Philippe Schoenborn

Keith K Chao

Kai Zhang

Shumay X Dou

Dilip Vijay

Rongxiang Hu

Sarah Neuman

Wilbur G Catabay

Wei-Jen Hsia

Hongqiang Lu

A method for forming a dual damascene interconnect in a dielectric layer is provided. Generally, a first aperture is etched in the dielectric. A poison barrier layer is formed over part of the dielectric, which prevents resist poisoning. A patterned mask is formed over the poison barrier layer. A second aperture is etched into the dielectric layer, wherein at least part of the first aperture shares the same area as at least part of the second aperture.

Method of preventing resist poisoning in dual damascene structures

The present invention is directed to a silicon carbide anti-reflective coating (ARC) and a silicon oxycarbide ARC. Another embodiment is directed to a silicon oxycarbide ARC that is treated with oxygen plasma. The invention includes method embodiments for forming silicon carbide layers and silicon oxycarbide layers as ARC's on a semiconductor substrate surface. Particularly, the methods include introducing methyl silane materials into a process chamber where they are ignited as plasma and deposited onto the substrate surface as silicon carbide. Another method includes introducing methyl silane precursor materials with an inert carrier gas into the process chamber with oxygen. These materials are ignited into a plasma, and silicon oxycarbide material is deposited onto the substrate. By regulating the oxygen flow rate, the optical properties of the silicon oxycarbide layer can be adjusted. In another embodiment, the silicon oxycarbide layer can be treated with oxygen plasma.

Anti-reflective coatings for use at 248 nm and 193 nm

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Stanford, CA, United States of America

Sang-Yun Lee