Carl Zeiss Microscopy Gmbh

Carl Zeiss Industrielle Messtechnik Gmbh

Sören Schmidt

Daniel Plohmann

Tomas Aidukas

Michael Baum

A method for generating a depth map of a region of a surface of a workpiece includes receiving a stack of images. The images image the region of the surface of the workpiece with defined focal plane positions that are different in a depth direction and a focal plane position is assigned to each. Image points of the images are respectively assigned to a corresponding object point on the surface. The method includes determining a focus value of each image point of each image. The method includes fitting a function along the depth direction to the focus values of those image points that are assigned to the same object point. The method includes determining a depth value of each object point on the surface in the depth direction based on an extremum of the fitted function. The method includes generating the depth map based on the determined depth values.

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Jena, Germany

Sören Schmidt