Average Co-Inventor Count = 6.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Kokusai Electric Corporation (2 from 615 patents)
2 patents:
1. 12381091 - Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus
2. 11699593 - Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium