Kanto Kagaku Kabushiki Kaisha

Ryota Iwai

Masaru Kato

Tomoaki Tokuhisa

Masahiro Aoyagi

Yasuhiro Yamaji

Hiroshi Nakagawa

Katsuya Kikuchi

Tokihiko Yokoshima

An electroless gold plating solution with which one or more openings formed in a resist overlying a substrate can be filled in a short time, the openings having a width on the order of micrometer, in particular, 100 &#x3bc;m or smaller, in terms of the width of the exposed substrate area, and having a height of 3 &#x3bc;m or larger. The electroless gold plating solution contains a deposition accelerator for deposition in fine areas, and a microfine pattern of 100 &#x3bc;m or finer is formed therefrom.

Electroless gold plating solution for forming fine gold structure, method of forming fine gold structure using same, and fine gold structure formed using same

An electroless gold plating solution is provided that contains no cyanide compound as a source of gold and that contains a decomposition inhibitor represented by general formula (1), provided that, in a case in which the solution contains a gold complex of sulfite and the decomposition inhibitor is cytosine, the pH 6.0 or less is excluded.In the formula, Rto Rdenote hydrogen atom(s), alkyl group(s) having 1 to 10 carbon atom(s), which may have substituent(s), aryl group(s) having 6 to 10 carbon atoms, which may have substituent(s), alkoxy group(s) having 1 to 10 carbon atom(s), which may have substituent(s), amino group(s) (&#x2014;NH), hydroxyl group(s) (&#x2014;OH), &#x2550;O, or halogen atom(s),

Electroless gold plating solution

An electroless gold plating solution is provided in which an amount of gold deposited by a displacement reaction is at least 15 &#x3bc;g/cm, and the electroless gold plating solution includes a reducing agent that is oxidized by gold, and a reducing agent that is of the same type as or is a different type from the above reducing agent and is oxidized by a substrate metal. The solution can form a uniform gold coating having good adhesion and low porosity in one step.

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Saitama, Japan

Ryota Iwai