Average Co-Inventor Count = 2.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Kokusai Electric Corporation (3 from 612 patents)
3 patents:
1. 12518997 - Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium
2. 11854850 - Substrate processing apparatus, method of manufacturing semiconductor device, method of loading substrate and non-transitory computer-readable recording medium
3. 10559485 - Method of manufacturing semiconductor device, method of loading substrate and non-transitory computer-readable recording medium