Taiwan Semiconductor Manufacturing Comp. Ltd.

Ruei-Cheng Shiu

Huai-Ying Huang

I-Che Lee

A second metal structure such as a metal plug is formed over a first metal structure, such as a metal line, by causing metal material from the first metal structure to migrate into an opening in a dielectric layer over the first metal structure. The metal material, which may be copper, is of a type that undergoes a reduction in density as it oxidizes. Migration is induced using gases that alternately oxidize and reduce the metal material. Over many cycles, the metal material migrates into the opening. In some embodiments, the migrated metal material partially fills the opening. In some embodiments, the migrated metal material completely fills the opening.

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Hsinchu, Taiwan

Ruei-Cheng Shiu