Carl Zeiss Smt Gmbh

Carl-zeiss-smt Ag

Carl Zeiss Meditec Ag

Carl Zeiss Semiconductor Manufacturing Technologies Ag

Rudolf Von Buenau

Wilhelm Ulrich

Hans-Juergen Mann

Alexander Epple

Aurelian Dodoc

David R Shafer

Wolfgang Singer

Susanne Beder

Toralf Gruner

Manfred Maul

Hubert Holderer

Eckhard Schroeder

Matthias Wottke

Ulrich Haag

Christian Hembd-Soellner

Michael Totzeck

Martin Hacker

Daniel Kraehmer

Ingo Koschmieder

Roland Bergner

Wilfried Bissmann

Adolf Friedrich Fercher

Ralf Ebersbach

Roland Barth

Branislav Grajciar

Vladimir Kamenow

A projection objective configured to image an object field in an object plane into an image field in an image field plane includes a reflective unit, a first refractive unit, and a second refractive unit. An optical axis of the first refractive unit is parallel to but displaced from an optical axis of the second refractive unit. The reflective unit includes a first curved mirror and a second curved mirror. The second curved mirror is immediately downstream from the first curved mirror in a path of light from the object plane to the image plane. The projection objective is a microlithography projection objective.

Catadioptric projection objective with parallel, offset optical axes

A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first Intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter D, a maximum image field height Y', and an image side numerical aperture NA; wherein COMP=D/(Y&#x2032;&#xb7;NA) and wherein the condition COMP&#x3c;10 holds.

Immersion catadioptric projection objective having two intermediate images

A catadioptric projection objective for imaging a pattern onto an image plane includes: a first objective part for imaging the pattern into a first intermediate image; a second objective part for imaging the first intermediate image into a second intermediate image; and a third objective part for imaging the second intermediate image onto the image plane. A first concave mirror having a continuous mirror surface and a second concave mirror having a continuous mirror surface are upstream of the second intermediate image. A pupil surface is formed between the object plane and the first intermediate image, between the first and the second intermediate image, and between the second intermediate image and the image plane. A plate having essentially parallel plate surfaces is positioned in the first objective part near the pupil surface. At least one plate surface is aspherized to correct for aberrations.

Catadioptric projection objective including an aspherized plate

A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter D, a maximum image field height Y', and an image side numerical aperture NA; wherein COMP=D/(Y&#x2032;&#xb7;NA) and wherein the condition COMP&#x3c;10 holds.

Catadioptric projection objective

A device for performing distance measurements on an eye. The device includes an interferometer, focuses at least one measurement beam records backscattered radiation and interferometrically generates a measurement signal displaying structures of the eye by time-domain, spectral-domain or Fourier-domain coherence reflectometry, has an adjustment apparatus for laterally and/or axially displacing the focus in the eye or for varying a polarization state of the measurement beam and has a control apparatus which actuates the interferometer, wherein the control apparatus generates a plurality of A-scan individual signals from the backscattered radiation, combines these to an A-scan measurement signal and actuates the adjustment apparatus for displacing the position of the focus or for varying the polarization while recording the backscattered radiation from which the control apparatus generates the A-scan individual signals is being recorded.

Optical coherence reflectometry with depth resolution

A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part for imaging the first intermediate imaging into a second intermediate image; a third objective part for imaging the second intermediate imaging directly onto the image plane; wherein a first concave mirror having a first continuous mirror surface and at least one second concave mirror having a second continuous mirror surface are arranged upstream of the second intermediate image; pupil surfaces are formed between the object plane and the first intermediate image, between the first and the second intermediate image and between the second intermediate image and the image plane; and all concave mirrors are arranged optically remote from a pupil surface. The system has potential for very high numerical apertures at moderate lens material mass consumption.

A method for changing a property of an eye uses a continuously multifocal profile that includes a component for increasing a focal depth. The method includes calculating the component for increasing the focal depth to be rotation-symmetrical. Alternatively, or in addition, the calculating is carried out so as to optimize an encircled energy criterion over an extended range of depth.

Method and device for increasing an optical system focal depth

A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter D, a maximum image field height Y', and an image side numerical aperture NA; wherein COMP1=D/(Y&#x2032;&#xb7;NA) and wherein the condition COMP1&#x3c;10 holds.

A method and device for modifying optical system properties by means of a continuously multifocal profile, wherein said profile comprises a component for increasing the optical system focal depth and is calculated according to a fourth-order Zernike polynom. The aim of said invention is to avoid the eye base refraction and, for this purpose, said focal depth increasing component is also calculated according to the second-order Zernike polynom.

A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part for imaging the first intermediate imaging into a second intermediate image; a third objective part for imaging the second intermediate imaging directly onto the image plane;

Growing community of inventors

Jena, Germany

Rudolf Von Buenau