Nova Measuring Instruments Ltd.

Roy Koret

Gilad Barak

Yanir Hainick

Vladimir Machavariani

Boris Levant

Determining parameters of a patterned structure located on top of an underneath layered structure, where input data is provided which includes first measured data PMD being a function &#x192; of spectral intensity Iand phase &#x3d5;, PMD=&#x192;(I; &#x3d5;), corresponding to a complex spectral response of the underneath layered structure, and second measured data Sindicative of specular reflection spectral response of a sample formed by the patterned structure and the underneath layered structure, and where a general function F is also provided describing a relation between a theoretical optical response Sof the sample and a modeled optical response Sof the patterned structure and the complex spectral response PMD of the underneath layered structure, such that S=F(S; PMD), where the general function is then utilized for comparing the second measured data Sand the theoretical optical response S, and determining parameter(s) of interest of the top structure.

Method and system for optical metrology in patterned structures

A data analysis method and system are presented for use in determining one or more parameters of a patterned structure located on top of an underneath layered structure. According to this technique, input data is provided which includes first measured data PMD being a function &#x192; of spectral intensity I&#x3bb; and phase &#x3c6;, PMD=&#x192;(I;&#x3c6;), corresponding to a complex spectral response of the underneath layered structure, and second measured data Sindicative of specular reflection spectral response of a sample formed by the patterned structure and the underneath layered structure. Also provided is a general function F describing a relation between a theoretical optical response Sof the sample and a modeled optical response Sof the patterned structure and the complex spectral response PMD of the underneath layered structure, such that S=F(S; PMD). The general function is then utilized for comparing the second measured data Sand the theoretical optical response S, and determining parameter(s) of interest of the top structure.

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Roy Koret