Chengdu Monolithic Power Systems Co., Ltd.

Monolithic Power Systems, Inc.

Chengdu Monolithic Power Systems, Inc.

Rongyao Ma

Tiesheng Li

Lei Zhang

Donald Ray Disney

Daping Fu

Huaifeng Wang

Tieshing Li

The present disclosure discloses a field effect transistor ('FET'), a termination structure and associated method for manufacturing. The termination structure for the FET includes a plurality of termination cells arranged substantially in parallel from an inner side toward an outer side of a termination area of the FET. Each of the termination cells comprises a termination trench and a guard ring region located underneath the bottom of the termination trench in the semiconductor layer. Each termination trench is lined with a termination insulation layer, and is filled with a first conductive spacer and a second conductive spacer respectively against an inner sidewall and an outer sidewall of the termination trench and spaced apart from each other with a space, and a dielectric layer filling the space between the first and the second spacers.

Field effect transistor, termination structure and associated method for manufacturing

A semiconductor device having an ESD protection structure and a method for forming the semiconductor device. The ESD protection structure is formed atop a termination area of the substrate and is electrically coupled between a source metal and a gate metal of the semiconductor device. The ESD protection structure has a first portion adjacent to the source metal, a second portion adjacent to the gate metal and a middle portion between and connecting the first portion and the second portion, wherein the middle portion has a first thickness greater than a second thickness of the first portion and the second portion. Such an ESD protection structure is beneficial to the formation of interlayer vias which are formed to couple the ESD protection structure to the source metal and the gate metal.

Semiconductor device and associated method for manufacturing

A field effect transistor ('FET'), a termination structure and associated method for manufacturing. The FET has a plurality of active transistor cells and a termination structure. The termination structure for the FET includes a plurality of termination cells arranged substantially in parallel from an inner side toward an outer side of a termination area of the FET. Each of the termination cells comprises a termination trench lined with a termination insulation layer and filled with a termination conduction layer. The innermost termination cell is electrically coupled to gate regions of the active transistor cells while the rest of the termination cells are electrically floating.

A semiconductor device with a substrate, an epitaxy layer formed on the substrate, a plurality of deep wells formed in the epitaxy layer, a plurality of trench gate MOSFET units each of which is formed in top of the epitaxy layer between two adjacent deep well, wherein a trench gate of the trench gate MOSFET unit is shallower than half of the distance between two adjacent deep wells, which may reduce the product of on-state resistance and the gate charge of the semiconductor device.

Super junction semiconductor device and associated fabrication method

A JFET having a semiconductor substrate of a first doping type, an epitaxial layer of the first doping type located on the semiconductor substrate, a body region of a second doping type located in the epitaxial layer, a source region of the first doping type located in the epitaxial layer, a gate region of the second doping type located in the body region, and a shielding layer of the second doping type located in the epitaxial layer, wherein the semiconductor substrate is configured as a drain region, the shielding layer is in a conductive path formed between the source region and the drain region.

Junction field effect transistors and associated fabrication methods

An ESD protection structure and a semiconductor device having an ESD protection structure with the ESD protection structure including a patterned conductive ESD protection layer. The ESD protection layer is patterned to have a first portion of a substantially closed ring shape having an outer contour line and an inner contour line parallel with each other. The outer and the inner contour lines are waved lines. The first portion further has a midline between and parallel with the outer and the inner contour lines. The midline is a waved line having a substantially constant curvature at each point of the midline. Therefore the ESD protection layer has a substantially uniform curvature and an increased perimeter which advantageously improve the breakdown voltage and the current handling capacity of the ESD protection structure.

ESD protection structure and semiconductor device comprising the same

The embodiments of the present disclosure disclose a trench-gate MOSFET device and the method for making the trench-gate MOSFET device. The trench-gate MOSFET device comprises a curving dopant profile formed between the body region and the epitaxial layer so that the portion of the body region under the source metal contact has a smaller vertical thickness than the other portion of the body region. The trench-gate MOSFET device in accordance with the embodiments of the present disclosure has improved UIS capability compared with the traditional trench-gate MOSFET device.

Trench-gate MOSFET device and method for making the same

A split trench-gate MOSFET device and method for forming this device is disclosed. The device has a trench gate structure, comprising a shield electrode and two gate electrodes, wherein a substantial portion of shield electrode region is lower than the gate electrode region, and wherein a portion of the shield electrode region extends to the top surface between the two gate electrodes. The device further comprises a source metal layer, contacting to an initial layer, a well region, the shield electrode and a source region at the top surface, wherein the contact between the source metal layer and the initial layer forms a Schottky diode.

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Chengdu, China

Rongyao Ma